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Method for detecting curvature radius of toroidal mirror through combining contourgraph and interferometer

A technology of curvature radius and interferometer, which is applied in the direction of instruments, measuring devices, and optical devices, can solve the problems of difficult tire surface processing and detection, easy scratching or damage to the sample surface, and incomprehensible measurement accuracy. The effect of high processing difficulty, optimized processing technology, and expanded application range

Inactive Publication Date: 2018-03-27
TONGJI UNIV
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  • Application Information

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Problems solved by technology

Since contact measurement is easy to scratch or damage the surface of the sample during the detection process, it cannot be compared with non-contact measurement in terms of measurement accuracy and method complexity.
And all the above methods are aimed at the detection of the traditional spherical radius, which brings great difficulties to the processing and detection of the tire surface

Method used

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  • Method for detecting curvature radius of toroidal mirror through combining contourgraph and interferometer
  • Method for detecting curvature radius of toroidal mirror through combining contourgraph and interferometer
  • Method for detecting curvature radius of toroidal mirror through combining contourgraph and interferometer

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Embodiment 1

[0030] In this embodiment, the Bruker optical profiler and the Zygo plane interferometer are used to detect the radius of curvature of the tire mirror. The length, width and height of the lens are 510mm×50mm×60mm, the working surface to be tested is 510mm×50mm, and the lens is designed with two radii of curvature Respectively R 1 = 104870mm and R 2 =658.5mm. The radius of curvature specifically includes the following steps:

[0031] (1) Place the tire mirror to be tested on the optical profiler, and collect multiple test points from the center to the edge. In this example, test 5 rows of points equidistant in the length direction of the mirror surface, and test 3 points in each row. Using the optical profiler to detect the position of the test point of the tire mirror is as follows: figure 1 As shown, the circle in the figure indicates the position of the test point of the optical profiler, and the 2.5x objective lens is selected to test its surface profile;

[0032] (2) U...

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Abstract

The invention relates to a method for detecting the curvature radius of a toroidal mirror through combining a contourgraph and an interferometer, and the method employs an interference method for detecting the small and big curvature radiuses of the toroidal mirror according to the features of the toroidal mirror. The method comprises the following steps: detecting the small curvature radius: obtaining the actual measurement surface shape and appearance of the toroidal mirror through an optical contourgraph, extracting the contour data points in the direction of the small curvature radius, andcarrying out the fitting to obtain the small curvature radius; detecting the big curvature radius: detecting the plane shape contour data of the toroidal mirror through a plane interferometer, extracting the detection data points of the interferometer in the direction of the big curvature radius, and carrying out the fitting to obtain the big curvature radius. Compared with the prior art, the method is advantageous in non-contact mode and high precision.

Description

technical field [0001] The invention relates to the field of tire mirror curvature radius detection, in particular to a method for detecting two curvature radii of tire mirrors by combining an optical profiler and a plane interferometer. Background technique [0002] Tread lenses and mirrors have special optical properties due to the large difference in radius of curvature on the orthogonal meridian plane and sagittal plane, and are widely used in large-scale optical observation systems and laser focusing devices. For example, tread mirrors can also be used as single focusing optics for applications requiring long focal lengths. Or in the grazing incidence X-ray focusing or microscopic system, the tire mirror can be used to focus the X-rays with different magnifications in two dimensions, and even produce line focusing; another example is in the KB and KBA focusing systems, using two tire mirrors for correction Aberrations to improve the focusing performance of the optical ...

Claims

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Application Information

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IPC IPC(8): G01B11/255
CPCG01B11/2441G01B11/255
Inventor 沈正祥张众黄秋实
Owner TONGJI UNIV
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