High-spatial-resolution pumping-detection micro-zone measurement device, system and method

Abstract

The invention discloses a high-spatial-resolution pumping-detection micro-zone measurement device, system and method. The device comprises a laser device, a light splitter, a pumping laser adjusting assembly, a detection laser adjusting assembly, a beam combiner, a micro-zone measurement assembly and a light intensity detection assembly, wherein the pumping laser adjusting assembly is used for adjusting one of two beams of laser to obtain pumping laser; the detection laser adjusting assembly is used for adjusting the other one of the two beams of laser to obtain detection laser; the beam combiner is used for carrying out beam combination on the pumping laser and the detection laser; the micro-zone measurement assembly is used for positioning a measurement position of a sample to be detected in a microscopic manner before measurement, focusing the pumping laser and the detection laser and detecting the sample to be detected; the light intensity detection assembly is used for detecting the light intensity of the detection laser and the light intensity of transmission laser of the sample to be detected. By adopting the high-spatial-resolution pumping-detection micro-zone measurement device, system and method, a high-spatial-resolution micro-zone optical image and a detection image of the sample to be detected can be provided; the high-spatial-resolution pumping-detection micro-zone measurement device, system and method have the advantages of good imaging effect, good linear effect and the like.

Description

technical field [0001] The present invention relates to the field of pump-probe, in particular to a pump-probe micro-area measurement device and system with high spatial resolution, which is used in parameter measurement of semiconductor materials and optical materials, spectrum, phase shift dispersion measurement and material engineering , in semiconductor materials, especially in the study of visual detection of carrier transport characteristics of semiconductor materials. Background technique [0002] Transient spectroscopy can provide us with information about material carrier excitation and relaxation processes that cannot be provided by steady-state spectroscopy. The generation and annihilation of many intermediate states must be characterized and determined with the help of transient spectral information. For semiconductor materials and optical materials, under the excitation of the pump laser, the transport process of photogenerated carriers is often an ultrafast ki...

AI Technical Summary

Problems solved by technology

However, the existing pump-probe system can only roughly determine the scanning position before scanning and detecting the sample to be tested, and can only roughly determine the scanning area according to the scanning results after the scanning is completed.

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