A pump-probe micro-area measurement device, system and method with high spatial resolution

Abstract

The invention discloses a pump-probe micro-area measurement device, system and method with high spatial resolution. The device includes: a laser, a beam splitter, a pump laser adjustment component, a detection laser adjustment component, a beam combiner, and a micro-area measurement component. and the light intensity detection component; the pump laser adjustment component is used to adjust one of the two laser beams to obtain the pump laser; the detection laser adjustment component is used to adjust the other of the two laser beams to obtain the detection laser The beam combiner is used to combine the pump laser and the probe laser; the micro-area measurement component is used to microscopically locate the measurement position of the sample to be measured, and focus the pump laser and the probe laser to measure the sample. To detect; the light intensity detection component is used to detect the light intensity of the detection laser and the light intensity of the transmitted laser of the sample to be measured. It can provide high spatial resolution optical images and detection images of the micro-area of ​​the sample to be tested, and has the advantages of good imaging effect and linear effect.

Description

technical field [0001] The present invention relates to the field of pump-probe, in particular to a pump-probe micro-area measurement device and system with high spatial resolution, which is used in parameter measurement of semiconductor materials and optical materials, spectrum, phase shift dispersion measurement and material engineering , in semiconductor materials, especially in the study of visual detection of carrier transport characteristics of semiconductor materials. Background technique [0002] Transient spectroscopy can provide us with information about material carrier excitation and relaxation processes that cannot be provided by steady-state spectroscopy. The generation and annihilation of many intermediate states must be characterized and determined with the help of transient spectral information. For semiconductor materials and optical materials, under the excitation of the pump laser, the transport process of photogenerated carriers is often an ultrafast ki...

AI Technical Summary

Problems solved by technology

However, the existing pump-probe system can only roughly determine the scanning position before scanning and detecting the sample to be tested, and can only roughly determine the scanning area according to the scanning results after the scanning is completed.

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