A chip sintered product, subunit, igbt package module and preparation method
A technology for encapsulating modules and sintered products, which is applied in the direction of electrical components, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc. It can solve problems such as low shear strength, lower thermal resistance, and poor compactness of the thermal interface layer. Achieve the effect of increasing shear strength, reducing thermal resistance and avoiding agglomeration
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[0060] In the preparation process of the IGBT package module, the pressure sintering equipment of the model Auto-F-XL-HC manufactured by boschman can be used in the pressure sintering process.
[0061] Chip sintered products:
Embodiment 1
[0063] This embodiment provides a chip sintered product, including a first molybdenum sheet and a second molybdenum sheet and a chip 7 arranged between them, at least one of the first molybdenum sheet and the second molybdenum sheet is a prefabricated molybdenum sheet The prefabricated molybdenum sheet is a molybdenum sheet with a prefabricated nano-silver film 14 on the surface, and at least one side of the chip 7 is in contact with the prefabricated nano-silver film 14 .
[0064] In the present embodiment, the first molybdenum sheet is a prefabricated molybdenum sheet, which is obtained by pressing the prefabricated nano-silver film 14 on the upper molybdenum sheet 6, and the second molybdenum sheet is a non-prefabricated molybdenum sheet, that is, the lower molybdenum sheet 8; In another embodiment, both the first molybdenum sheet and the second molybdenum sheet are prefabricated molybdenum sheets.
[0065] In the above chip sintering products, the use of prefabricated nano...
Embodiment 2
[0076] This embodiment provides a chip subunit 15, such as image 3 As shown, including the chip sintered product in embodiment 1;
[0077] The metal support sheet is in contact with the lower molybdenum sheet 8 and is used to support the chip sintered product; in the present embodiment, the metal support sheet is a silver sheet 9;
[0078] The subunit frame 3 has an opening at one end, and a support unit suitable for supporting the metal support sheet is arranged in it; in this embodiment, the support unit can specifically be provided with a groove on the inner peripheral wall of the subunit frame 3 close to the opening, The groove is suitable for the metal support sheet to be stuck on it through the opening, and the subunit frame 3 is made of PEAK material; The shaft extends perpendicular to the inner wall, and the metal support sheet can be placed on the support shaft;
[0079] A connection unit, one end of which is in contact with the grid on the chip, to ensure its elec...
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