Array substrate, fabrication method thereof and display device
A technology of array substrate and substrate substrate, which is applied in semiconductor/solid-state device manufacturing, instruments, semiconductor devices, etc., to avoid difficulty in climbing, reduce the area of overlapping areas, and improve crosstalk.
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Embodiment 1
[0036] Such as figure 1 As shown, the embodiment of the present invention provides an array substrate, including: a base substrate 1 (not shown in the figure), intersecting gate lines 2 and data lines 3 arranged above the base substrate 1, and thin film transistors 4 The thin film transistor 4 includes: a gate, an active layer 41 disposed on the side of the gate away from the base substrate 1, and a source 42 and a drain 43 disposed on the side of the active layer 41 away from the base substrate 1; The gate of 4 is a part of the gate line 2; the source 42 is a part of the data line 3, and at least part of the area of the source 42 is located in the area where the orthographic projection of the data line 3 and the gate line 2 on the base substrate 1 overlaps. .
[0037]It should be noted that, first, if figure 2 As shown, the above-mentioned array substrate certainly also includes a gate insulating layer 5 disposed to cover the gate lines 2 , and the specific structure can...
Embodiment 2
[0061] An embodiment of the present invention also provides a method for preparing the above-mentioned array substrate, which includes: sequentially forming a gate line, a gate insulating layer, an active layer, a data line, and a drain on the base substrate; wherein, A part of the gate line is used as the gate, the active layer is formed on the top of the gate, and the drain is formed on the active layer; a part of the data line is used as the source, and at least part of the source area is located between the data line and the gate line. The orthographic projection on the substrate exists in an overlapping area; the gate, active layer, source and drain form a thin film transistor (Thin Film Transistor, TFT).
[0062] Wherein, the step of forming the data line and the drain electrode includes: sequentially forming a metal layer and a photoresist layer on the base substrate on which the gate line, the gate insulating layer and the active layer are formed; Exposure and developm...
Embodiment 3
[0082] On the basis of the above, an embodiment of the present invention further provides a display device, including the above-mentioned array substrate. The display device may specifically be a liquid crystal display device, and may be a product or component with any display function such as a liquid crystal display, a liquid crystal TV, a digital photo frame, a mobile phone, a tablet computer, a navigator, and the like.
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