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Silicon wafer transshipment and loading device and silicon wafer transshipment and loading method based on same

A loading device and transfer device technology, which is applied in transportation and packaging, photovoltaic power generation, electrical components, etc., can solve problems such as automatic loading and unloading, and achieve automatic transfer, reduce damage rate, and high work efficiency.

Inactive Publication Date: 2018-04-06
HEBEI JING LONG SUN EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] None of the above mechanisms can realize the full automatic loading and unloading work during the silicon wafer diffusion and annealing process.

Method used

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  • Silicon wafer transshipment and loading device and silicon wafer transshipment and loading method based on same
  • Silicon wafer transshipment and loading device and silicon wafer transshipment and loading method based on same
  • Silicon wafer transshipment and loading device and silicon wafer transshipment and loading method based on same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Such as Figure 1-10 A silicon wafer transfer loading device is shown, which includes a frame 1, two quartz boat positioning loading and unloading systems 2, a flower basket channel transfer system 3 and a double-head transfer manipulator system 4; the two quartz boat positioning loading and unloading systems 2 are respectively It is arranged on the left and right sides of the frame 1, the flower basket channel transfer system 3 is arranged in the middle of the frame 1 and is located between the two quartz boat positioning loading and unloading systems 2, and the double-head transfer manipulator system 4 is horizontal It straddles the left and right sides of the frame 1 and is located above the quartz boat positioning loading and unloading system 2 and flower basket channel transfer system 3 .

[0037] Such as figure 2 As shown, the quartz boat positioning loading and unloading system 2 includes a quartz boat horizontal movement mechanism 2-1, a quartz boat positionin...

Embodiment 2

[0046] A silicon wafer diffusion transfer loading method based on the silicon wafer transfer loading device described in Embodiment 1, the groove spacing of the quartz boat is 2.38mm, and the groove spacing of the flower basket is 4.76mm; the ordinary boat has 200 grooves and can hold 200 pieces ; The big boat has 500 slots and can hold 500 pieces; the flower basket has 50 slots and can hold 50 pieces.

[0047] Proceed as follows:

[0048] The silicon chips are transferred from the flower baskets to the quartz boat: place the two flower baskets containing the silicon chips in the two flower basket channels 3-1 respectively, and place the two flower baskets one positive and one reverse; A quartz boat is placed on the loading and unloading system, and the quartz boat horizontal movement mechanism 2-1 transports the quartz boat to the middle, and is positioned by the quartz boat positioning mechanism 2-2; under the action of the transfer device in the flower basket channel, the f...

Embodiment 3

[0052] A silicon wafer annealing transfer loading method based on the silicon wafer transfer loading device according to claim 1, characterized in that the steps are as follows: the groove spacing of the quartz boat is 2.38mm, the groove spacing of the flower basket is 4.76mm; the ordinary boat is 200 The one with 50 slots can hold 200 pieces; the one with 500 slots can hold 500 pieces; the flower basket with 50 slots can hold 50 pieces.

[0053] Silicon chips are transferred from flower baskets to quartz boats: place the two flower baskets containing silicon chips on the feeding section 301 in the two flower basket channels 3-1 respectively; position the loading and unloading system 2 on the two quartz boats The quartz boats are respectively placed on the top, and the quartz boat horizontal movement mechanism 2-1 transports the quartz boats to the middle, and is positioned by the quartz boat positioning mechanism 2-2; under the action of the transfer device in the flower baske...

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Abstract

The present invention relates to a silicon wafer transshipment and loading device and a silicon wafer transshipment and loading method based on the same. The device comprises a rack, two railboat positioning feeding and blanking systems, a flower basket channel transshipment system and a double-end transshipment manipulator system. The two railboat positioning feeding and blanking systems are respectively arranged at left and right sides of the rack, the flower basket channel transshipment system is arranged at the middle portion of the rack and located between the two railboat positioning feeding and blanking systems, and the double-end transshipment manipulator system crosses the left and right sides of the rack and is located above the railboat positioning feeding and blanking systems and the flower basket channel transshipment system.

Description

technical field [0001] The invention relates to production and processing equipment and a process method of silicon wafers in solar panels, in particular to a silicon wafer transfer loading device with a high degree of automation and a silicon wafer transfer loading method using the device. Background technique [0002] For the diffusion and annealing process in the production process of solar cells, it is necessary to transfer the silicon wafers between the quartz boat and the flower basket loading device. During the processing of solar cells, in the process of annealing and diffusion, it is necessary to load and remove the cells into and out of the quartz boat. Most of the quartz boats used in the current process are half-pitch quartz boats with 200 slots, and the slot pitch is only 2.38mm. The annealing process is one piece per groove, and the diffusion process is two pieces per groove. [0003] In the conversion process of silicon wafers in the loading device, there is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L31/18
CPCH01L21/67781H01L31/1804Y02E10/547Y02P70/50
Inventor 赵京通李世杰王冲普黄旭光李润飞李永哲贾世涛侯颖张路法王瑞贤王宗江
Owner HEBEI JING LONG SUN EQUIP
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