MEMS micro-thruster array chip with thrust range extending module

Abstract

The invention relates to an MEMS micro-thruster array chip with a thrust range extending module. The MEMS micro-thruster array chip comprises an ignition layer, a powder chamber layer and the thrust range extending module which are sequentially arranged from bottom to top, wherein external jet holes are formed in the upper surface of the thrust range extending module; internal jet holes are formedin the lower surface of the thrust range extending module; a monocrystalline silicon film is arranged between the external jet holes and the internal jet holes, and is used as a diaphragm between theexternal jet holes and the internal jet holes; and high-energy nanometer energy-containing films, as a propellant of the thrust range extending module, grow or are deposited on the inner walls of theinternal jet holes. According to the MEMS micro-thruster array chip disclosed by the invention, under the situation that the structure and the property parameters of a core engine are not changed, the thrust range extending module is additionally arranged, so that the regulation and the control of key technological indexes of the MEMS micro-thruster array chip are realized, and realization of batch, low cost, serialization and type spectrum of the MEMS micro-thruster array chips is facilitated.

Description

technical field [0001] The invention relates to a micro thruster array chip, in particular to a MEMS micro thruster array chip with a thrust range extender module. Background technique [0002] Micro-nano-satellites and micro-nano-satellite constellations have become one of the current important research hotspots in the world, and all major aerospace countries have carried out related research. Due to the limitations of volume and load capacity, the micro-nano satellites that have been launched and are currently under development do not have complete attitude and orbit control capabilities, and only have limited orbital maneuverability. The MEMS micro-propulsion system based on MEMS technology and microelectronics technology has emerged as the times require, and has become a strong competitor for micro-spacecraft attitude and orbit control technologies such as micro-satellites and micro-satellite constellations. [0003] With the advancement of MEMS technology, the diameter...

AI Technical Summary

Problems solved by technology

In the traditional "sandwich" structure, changing the technical specifications of the MEMS micro-thruster unit requires modification of the design parameters and structural parameters of the micro-thruster. The development cycle is long and the cost is high, which is not conducive to mass production and serialization of products.

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