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Anticorrosion structure design for micro-range silicon piezoresistive sensor

A structural design, silicon piezoresistive technology, applied in the direction of measuring fluid pressure, instruments, measuring force, etc., can solve problems affecting sensor accuracy, erosion, etc.

Inactive Publication Date: 2018-04-13
天津航空机电有限公司
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  • Summary
  • Abstract
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Problems solved by technology

[0002] Since the oil-filled protection of the pressure-sensitive part of the micro-range silicon piezoresistive sensor will affect the accuracy of the sensor, if it is not filled with oil, it will be eroded

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  • Anticorrosion structure design for micro-range silicon piezoresistive sensor
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  • Anticorrosion structure design for micro-range silicon piezoresistive sensor

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Embodiment Construction

[0018] The technical scheme of the present invention will be described in further detail below in conjunction with accompanying drawing and embodiment:

[0019] See attached Figure 1-7 As shown, the technical solution of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments:

[0020] The anti-corrosion structure of the micro-range silicon piezoresistive sensor is characterized in that:

[0021] The structure mainly includes a pressure nozzle 1 , an adapter 2 , a pressure-sensitive core 3 , a connecting pipe 4 , and a waterproof and breathable device 5 .

[0022] The pressure nozzle 1 is connected to the adapter 2 through an M10 thread, and the waterproof and ventilating device is installed between the pressure nozzle 1 and the adapter 2, and the pressure nozzle 1 fixes the waterproof and ventilating device 5 by extrusion.

[0023] The pressure-sensing core 3 connects the positive pressure-sensing end to...

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Abstract

The invention is an anticorrosion structure design for a micro-range silicon piezoresistive sensor, which includes a waterproof breathable device and a threaded installation sealing structure. In viewof the anticorrosion requirements of the micro-range silicon piezoresistive pressure sensor (less than 7kPa), the original structural part equipped with a pressure sensing core is redesigned. Therefore, the micro-range silicon piezoresistive pressure sensor is resistant to corrosion on the basis of meeting the requirements of pipeline installation.

Description

technical field [0001] The invention belongs to the technical field of structures, and relates to an anti-corrosion structure design of a silicon piezoresistive sensor with a small range. Background technique [0002] Since the oil-filled protection of the pressure-sensitive part of the micro-range silicon piezoresistive sensor will affect the accuracy of the sensor, if it is not filled with oil, it will be corroded. For this reason, the sensor adapter nozzle is designed, and a replaceable waterproof and ventilating device is installed inside it, which can effectively reduce the corrosion of the silicon chip inside the sensor by corrosive gases such as salt spray, save installation space, and reduce installation weight. The requirements for the replaceable protective device meet the requirements and development trend of micro-range silicon piezoresistive sensors used in harsh conditions. Contents of the invention [0003] The invention aims at the deficiency of anti-corro...

Claims

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Application Information

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IPC IPC(8): G01L1/26G01L19/06
CPCG01L1/26G01L19/0654
Inventor 李金松陈虎张鹏翼
Owner 天津航空机电有限公司
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