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Polysilicon preparation apparatus

A technology for manufacturing equipment, polysilicon, applied in the direction of feeding equipment, silicon compounds, chemical/physical/physicochemical processes of applied energy, etc., can solve problems such as economic loss, discontinuity, etc.

Inactive Publication Date: 2018-04-17
HANWHA CHEMICAL CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The high temperature caused by the arc melts the silicon and the molten silicon drips to the bottom of the CVD reactor causing a discontinuity in the process
That is, the popcorn sector 163 causes economic losses in polysilicon production

Method used

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  • Polysilicon preparation apparatus
  • Polysilicon preparation apparatus
  • Polysilicon preparation apparatus

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Experimental program
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Embodiment Construction

[0062] The present invention will be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. As those skilled in the art would realize, the present invention may be modified in various different ways, all without departing from the spirit or scope of the present invention. The drawings and descriptions are to be regarded as illustrative in nature and not restrictive. Throughout the specification, like reference numerals refer to like elements.

[0063] figure 1 is a schematic plan view of the polysilicon manufacturing apparatus according to the first exemplary embodiment of the present invention, and figure 2 yes figure 1 Schematic perspective view of the polysilicon fabrication apparatus. refer to figure 1 and figure 2 , the polysilicon manufacturing apparatus according to the first exemplary embodiment of the present invention is provided with cooling nozzles 50 that spray cooling gas...

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Abstract

A polysilicon preparation apparatus according to one embodiment of the present invention comprises a reactor disposed on a base and forming a reaction chamber; one pair of electrode terminals providedat the base and extended inside the reaction chamber; rod filaments provided at the electrode terminals inside the reaction chamber, and connected to each other at the upper ends thereof by a rod bridge, so as to form a silicon rod of polysilicon by the chemical vapor deposition of a raw gas; and a cooling and spraying nozzle for spraying a cooling gas at the silicon rod formed from silicon deposited around the rod bridge and the rod filaments.

Description

technical field [0001] The invention relates to a device for manufacturing polysilicon. More specifically, the present invention relates to a polysilicon manufacturing apparatus that cools the upper portion of a silicon rod formed by depositing silicon on a rod bridge. Background technique [0002] Silicon (or polysilicon) in a polysilicon state is used as a basic material in solar power generation and semiconductor industries, and the demand for polysilicon has rapidly increased with the development of the corresponding industrial fields. A representative polysilicon manufacturing method is a silicon deposition process (or chemical vapor deposition (CVD) process) in which solid polysilicon is formed from a silane raw material gas. [0003] Through the silicon deposition process, silicon particles are produced from silane raw material gas through hydrogen reduction reaction and thermal decomposition at high temperature, and then the silicon particles can be formed into rod-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J19/08C23C16/24
CPCC23C16/24B01J2208/00318B01J4/002C01B33/035C23C16/466B01J19/24
Inventor 朴成殷李熙东金知雄
Owner HANWHA CHEMICAL CORPORATION