A mortar spraying device for a multi-wire cutting machine and a cutting method thereof
A multi-wire cutting machine and mortar technology, which is applied in the direction of fine working devices, metal processing equipment, grinding machines, etc., can solve the problems of large impact force of sprayed mortar, high wafer defect rate, wafer cutting marks, etc., so as to improve the cutting ability , Improve the yield rate and reduce the effect of cutting marks
Active Publication Date: 2019-11-15
CHINA ELECTRONICS TECH GRP NO 46 RES INST
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[0032] The present invention will be described below in conjunction with the accompanying drawings and specific embodiments.
[0033] Such as Figure 1 to Figure 12 As shown, a mortar spraying device for a multi-wire cutting machine includes a multi-wire cutting machine, a mortar spraying device 1, and a flow control valve 2, and the mortar spraying device 1 includes a porous nozzle 1-4, a block Plate 1-2, connector 1-3, connecting plate 1-1, bent plate 1-5.
[0034] One end of the porous nozzle 1-4 is a port 1-4-2, and the other end is a pipe plug 1-4-2. Two rows of nozzle holes 1-4-3 are arranged on the body of the porous nozzle 1-4. Several spray holes in each row are arranged at intervals of 1-4-3.
[0035] The baffle plate 1-2 is a strip plate, the upper end of the baffle plate 1-2 is a straight plate, the lower end is a slanted plate 1-2-1, and the straight plate is provided with a connecting hole 1-2-2.
[0036] The connection plate 1-1 is a rectangular plate, and tw...
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The invention relates to a mortar spraying device used for a multi-wire cutting machine and a realization method. The realization method comprises the steps that a crystal rod is fixed to a working table of a plurality of steel wires of the multi-wire cutting machine; and the multi-wire cutting machine is started, a mortar stirring motor stirs mortar in a mortar storage tank, a mortar pump supplies the mortar to an upper spraying pipe and two multihole spraying pipes through a mortar pipe I, a mortar pipe II and a mortar pipe III, the two multihole spraying pipes spray the mortar on two baffles correspondingly, the mortar flows down from slopping plates at the lower ends of the baffles and adheres to the multiple steel wires, meanwhile, a working rolling wheel conducts reciprocating rotation, and the multiple steel wires are driven to conduct reciprocating cutting on the crystal rod. The sprayed mortar is evenly sprayed on the cutting steel wires through the multihole spraying pipes and the baffles on the two sets of mortar spraying devices; and according to the mortar spraying device used for the multi-wire cutting machine and the realization method, the rupture rate is reduced tobe within 2%, cutting marks on the wafer surface are reduced, the yield rate is improved, the yield rate of a slice product is improved from 92% to 98%, and the product quality is improved.
Description
technical field [0001] The invention relates to a mortar spraying device for a multi-wire cutting machine and a cutting method thereof, which belong to the field of semiconductor multi-wire cutting and are used on a multi-wire cutting machine to control the uniform flow of mortar. Background technique [0002] The original mortar spraying device used for multi-wire cutting machines uses a porous tube to spray mortar above the ingot. The impact force of the sprayed mortar is relatively large, resulting in chip breakage and edge chipping during cutting, and a high defect rate of the chip. Contents of the invention [0003] In view of the deficiencies in the prior art, the present invention provides a mortar spraying device and a cutting method for multi-wire cutting machines. The present invention redesigns the porous nozzle and the special baffle to make the mortar evenly sprayed On the cutting steel line, a flow control valve is added to control the flow of mortar at diff...
Claims
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IPC IPC(8): B28D5/04B28D7/00B24B27/06B24B57/02
CPCB24B27/0633B24B57/02B28D5/007B28D5/045
Inventor 吴建达郭明方继伟孙强
Owner CHINA ELECTRONICS TECH GRP NO 46 RES INST