A material recognition sensor based on a composite capacitive structure and its preparation method

Abstract

The invention discloses a material identification sensor based on a composite capacitance structure and a preparation method thereof. The structure is simple, the volume is small, the cost is low, anda dielectric constant and the elastic modulus can be measured simultaneously to identify the material. The sensor includes a first polar plate and a second polar plate which oppositely displaced, atleast two first electrodes opposite to the first polar plate, and at least one second electrode opposite to the second polar plate; and the preparation method comprises the following steps: coating asubstrate with an adhesion promoter; applying a negative photoresist on the adhesion promoter; performing exposure and development with a masking method, transferring a masking pattern onto the photoresist to obtain a patterned photoresist; sputtering the patterned photoresist surface with a metal film; removing the adhesion promoter, the photoresist, and the metal attached to the surface by a stripping process to form a metal electrode distributed according to a pattern, and thereby obtaining the polar plate; repeating the above steps to prepare the other polar plate, and after the two polarplates are matched, obtaining the material recognition sensor based on the composite capacitance structure.

Description

technical field [0001] The invention relates to a sensor, in particular to a material identification sensor based on a composite capacitive structure and a preparation method thereof. Background technique [0002] In the 21st century, the demand for intelligent manufacturing and intelligent services has accelerated the development of material recognition technology in tactile analysis. The top priority is to further improve the accuracy and intelligence of material recognition, and the exploration of sensor integration and precision improvement has become a research hotspot today. Elastic modulus is an important performance parameter of a substance. From a macroscopic point of view, it is a measure of the ability of an object to resist elastic deformation. From a microscopic point of view, it is a reflection of the bonding strength between atoms, ions or molecules. The dielectric constant is closely related to the structure, composition, density and other factors of the mat...

AI Technical Summary

Problems solved by technology

[0003] For the measurement of dielectric constant and elastic modulus, the sensor structure currently studied is relatively complex and bulky, and there is no sensor that can simultaneously measure dielectric constant and elastic modulus and identify materials

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