Inductance value-adjustable type on-chip integrated transformer and adjusting method thereof

Abstract

The invention discloses an inductance value-adjustable type on-chip integrated transformer and an adjusting method thereof, and belongs to the technical field of microelectronics. The inductance value-adjustable type on-chip integrated transformer comprises two grounding plates made of the bottom metal; a half-circle spiral inductor made of the top metal; a multi-turn spiral inductor made of the top metal and the secondary top metal, wherein the top metal and the secondary top metal are connected through via holes; and six electromagnetic side walls symmetrically distributed on the outer sideof the grounding plates and formed by rectangular metal strips arranged from a top layer to a bottom layer and connected through via holes. Each grounding plate is formed by three rectangular metal strips, and the rectangular metal strips are connected together to form the grounding plate. Four CMOS switches are distributed on the multi-turn spiral inductor. The four CMOS switches are respectivelyconnected with two different positions of the multi-turn spiral inductor. Through changing the voltage loaded on the grids of the CMOS switches and changing the connection state of the inductance signal line of the multi-turn spiral inductor, the inductance value of the transformer is changed.

Description

technical field [0001] The invention belongs to the field of integrated circuits, and in particular relates to an on-chip integrated transformer, in particular to an on-chip integrated transformer with adjustable inductance and an adjustment method thereof. Background technique [0002] In recent years, with the rapid development of CMOS technology, on-chip integrated transformers, as an important part of radio frequency integrated circuits, are widely used in circuits such as power amplifiers, low-noise amplifiers, voltage-controlled oscillators, and mixers. [0003] The existing on-chip integrated transformers mainly have several structures: such as bonded wire transformers, which can achieve high quality factor and small insertion loss, occupy a small chip area, and have a small range of inductance values ​​and coupling coefficients. Due to the uncertainty of the process, the inductance value fluctuates greatly and is not repeatable. Metal interconnection transformer is ...

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Problems solved by technology

[0003] The existing on-chip integrated transformers mainly have several structures: such as bonded wire transformers, which can achieve high quality factor and small insertion loss, occupy a small chip area, and have a small range of inductance values ​​and coupling coefficients. The uncertainty of the process, the inductance value fluctuates greatly and is not repeatable

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