MEMS accelerometer

Abstract

The invention provides an MEMS accelerometer. The MEMS accelerometer comprises a substrate, a movable part and a fixed electrode assembly, wherein an anchoring region is formed in the surface of the substrate; the movable part is connected with the anchoring region by virtue of a supporting beam and is suspended above the substrate, and the movable part comprises a first mass block and a second mass block; a first hollowed-out region is formed in the middle part of the first mass block and is I-shaped, and the second mass block is arranged in the first hollowed-out region; and the fixed electrode assembly comprises a first electrode assembly, the first electrode assembly is fixed on the surface of the substrate and is arranged between the substrate and the movable part, and the first electrode assembly forms a Z-axis detection capacitor bank with the first mass block and the second mass block, so that accelerated speed input along a Z axis is detected. The MEMS accelerometer provided by the invention has the advantages that the two mass blocks are arranged at an interval in a Y axis direction, so that the accelerometer not only can reduce substrate warping influence caused by stress but also can reduce zero offset caused by deflection of initial states of the mass blocks.

Description

technical field [0001] The invention relates to the field of microelectromechanical systems, and more specifically, relates to a MEMS accelerometer. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS) are micro-structures, micro-sensors, control processing circuits, and even interfaces, communications, and power supplies that are fabricated on one or more chips by using integrated circuit manufacturing technology and micro-processing technology. integrated system. Due to its small size, low cost, good integration, excellent performance and many other advantages, MEMS has been used more and more in a wide range of fields such as industry, medical treatment, civilian use, and military affairs. Acceleration sensor, as the most typical device using micro-electromechanical technology, has almost become the standard configuration of various mobile terminals, cameras, game controllers, navigators and other products. MEMS accelerometers can be divided into capaci...

AI Technical Summary

Problems solved by technology

[0004] In view of this, the present invention provides a MEMS three-axis accelerometer to solve the stress warpage caused by the manufacturing process or external environment temperature changes in the current accelerometer and the anchor point deflection caused by the manufacturing process, which leads to MEMS The problem of zero offset caused by the non-parallel plane of the structure and the plane of the fixed electrode

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