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Detection system for diffraction efficiency of transmission grating

A technology of transmission grating and diffraction efficiency, applied in the field of detection of diffraction efficiency of transmission grating, can solve the problems of limited number of light sources, inability to meet the optical research of wavelength bands, etc., and achieve the effect of small size, simple structure and convenient debugging.

Inactive Publication Date: 2018-05-15
GEOPTICS SEQUENCING EQUIP CO LTD
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Problems solved by technology

In terms of the experimental calibration of the diffraction efficiency of transmission gratings in the soft X-ray and extreme ultraviolet bands, laboratories at home and abroad usually choose synchrotron radiation light sources as the experimental light source. research needs

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  • Detection system for diffraction efficiency of transmission grating
  • Detection system for diffraction efficiency of transmission grating
  • Detection system for diffraction efficiency of transmission grating

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Embodiment Construction

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0034] As mentioned in the background technology, many scientific research institutions at home and abroad have conducted in-depth research on the calibration of transmission gratings, and have established rectangular grid line models and trapezoidal grid line models for calculating the diffraction efficiency of transmission gratings. However, these theoretical models are only an approximation of the cross-section of the transmission grating, and there is a gap...

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Abstract

The invention discloses a detection system for diffraction efficiency of a transmission grating. The detection system comprises a laser plasma light source, a monochromatic beam-splitting device and areceiving device, wherein the laser plasma light source is used for generating incident beams comprising soft X rays and extreme-ultraviolet wavebands; the monochromatic beam-splitting device is usedfor receiving the incident beams and selecting the soft X rays or the extreme-ultraviolet wavebands to exit; a to-be-detected transmission grating is arranged on a light exiting path of the monochromatic beam-splitting device; and the receiving device is used for receiving emergent images of the monochromatic beam-splitting device or receiving a diffraction image of the to-be-detected transmission grating, so that relative diffraction efficiency and / or absolute diffraction efficiency of the to-be-detected transmission grating can be analyzed according to the emergent images and the diffraction image. Therefore, according to the technical scheme provided in the invention, the adopted laser plasma light source has the advantages of small size, low price and the like, requirements of numerous laboratories can be met, and the detection system provided by the invention has the advantages of simple structure, convenient debugging and low cost.

Description

technical field [0001] The invention relates to the technical field of detecting the diffraction efficiency of a transmission grating, and more specifically relates to a detection system for the diffraction efficiency of a transmission grating. Background technique [0002] The transmission grating is an important dispersion element developed in the 1980s. It is applied in the soft X-ray and extreme ultraviolet bands, and has many advantages such as a large solid angle of light collection and a wide spectral range. The dispersive element can be combined with time and space resolution equipment to form a measurement device that can simultaneously measure time and space energy spectrum characteristics. Therefore, transmission gratings play an important role in spectral measurement work in various fields. [0003] However, in order to carry out quantitative energy spectrum measurement through the transmission grating, it is necessary to calibrate the diffraction efficiency of a...

Claims

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Application Information

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IPC IPC(8): G01M11/02
CPCG01M11/00
Inventor 李旭马洪涛
Owner GEOPTICS SEQUENCING EQUIP CO LTD
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