The invention discloses an on-line optical measurement
system and an online optical measurement method for the influence of rotary eccentricity on the crystalline state of a spin-coated film. The
system comprises a
light source module (100), an incident
light beam adjustment module (200), a polarization state regulation and control module (300), a polarization state detection module (400) and a
light beam acquisition module (500), the
light source module (100) outputs a collimated monochromatic
light beam, a linear light beam with a set light beam section shape and size is formed through the incident light beam adjusting module (200); an illumination light beam with a set polarization
azimuth angle is formed through the polarization state regulation and control module (300), a reflected light beam is formed after the illumination light beam is reflected by a sample,
linearly polarized light with a set polarization direction is formed through the polarization state detection module (400), and the area array measurement of the
light intensity of the cross section of the light beam is carried out through the light beam acquisition module (500). According to the invention, the polarization state regulation and control of an incident light beam can be realized, and sample information of multiple polarization azimuths is obtained; optical signals of different centrifugal positions ofthe sample are effectively distinguished; the
optical path structure is simple, the expansibility is good, and the optical device interchangeability is good.