On-line optical measurement system and method for influence of rotary eccentricity on crystalline state of spin-coated film

Abstract

The invention discloses an on-line optical measurement system and an online optical measurement method for the influence of rotary eccentricity on the crystalline state of a spin-coated film. The system comprises a light source module (100), an incident light beam adjustment module (200), a polarization state regulation and control module (300), a polarization state detection module (400) and a light beam acquisition module (500), the light source module (100) outputs a collimated monochromatic light beam, a linear light beam with a set light beam section shape and size is formed through the incident light beam adjusting module (200); an illumination light beam with a set polarization azimuth angle is formed through the polarization state regulation and control module (300), a reflected light beam is formed after the illumination light beam is reflected by a sample, linearly polarized light with a set polarization direction is formed through the polarization state detection module (400), and the area array measurement of the light intensity of the cross section of the light beam is carried out through the light beam acquisition module (500). According to the invention, the polarization state regulation and control of an incident light beam can be realized, and sample information of multiple polarization azimuths is obtained; optical signals of different centrifugal positions ofthe sample are effectively distinguished; the optical path structure is simple, the expansibility is good, and the optical device interchangeability is good.

Description

technical field [0001] The invention relates to the field of optical on-line measurement of thin films prepared by spin coating, in particular to an on-line optical measurement system and method for the influence of spin centrifugal amount on the crystal state of spin coating thin films. Background technique [0002] The spin-coating process is the basic process of thin-film semiconductor devices, and it is also one of the preferred processes for the research and small-batch trial production of new materials such as perovskite and two-dimensional materials. How to realize the improvement of film quality, yield and cost reduction through the optimization of spin coating process has always been a hot spot in spin coating process research and equipment upgrading. [0003] At present, the research on the quality of the spin-coating process is mainly based on the post-process inspection, and there are few reports on the real-time measurement of the film quality (crystalline state...

AI Technical Summary

Problems solved by technology

[0003] At present, the research on the quality of the spin-coating process is mainly based on the post-process inspection, and there are few reports on the real-time measurement of the film quality (crystalline state) at different positions during the spin-coating process, which makes the effective data for the study of the film formation process relatively scarce.

At the same time, the high rotational speed of the spin coating process is a huge challenge for real-time online measurement

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