Method for adjusting inclination angle of light beams and illumination device for adjusting inclination angle of light beams
A technology of beam inclination and lighting device, which is used in measurement devices, optical testing of flaws/defects, material analysis by optical means, etc. performance, simplicity of operation, and improved consistency
Inactive Publication Date: 2018-06-01
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Abstract
The invention discloses a method for adjusting the inclination angle of light beams. The method comprises steps as follows: S1, the light beams are collimated by a collimating lens, and the divergenceangle of light rays in the collimated light beams is smaller; S2, the inclination angle of the collimated light beams is adjusted by an angle regulator. The angle consistency of the light beams is improved, the uniformity of the illumination field of view is improved, the operation is simple and the production efficiency is improved. The invention also discloses an illumination device for adjusting the inclination angle of the light beams. The illumination device comprises at least one illumination mechanism, wherein the illumination mechanism comprises a light source, the collimating lens and the angle regulator which are arranged in the light ray propagation direction, light beams emitted by the light source are adjusted by the collimating lens to become parallel light beams, then, thelight beams are adjusted by the angle adjuster, angle deflection of the light beams is realized, the light beams are irradiated to the surface of a to-be-detected panel, and the large-angle oblique incidence illumination effect is realized.
Application Domain
Optically investigating flaws/contamination
Technology Topic
PhysicsOptoelectronics +5
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PUM
Property | Measurement | Unit |
Height | <= 15.0 | mm |
Divergence angle | <= 0.8 | deg |
Description & Claims & Application Information
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