Method for adjusting inclination angle of light beams and illumination device for adjusting inclination angle of light beams

A technology of beam inclination and lighting device, which is used in measurement devices, optical testing of flaws/defects, material analysis by optical means, etc. performance, simplicity of operation, and improved consistency

Inactive Publication Date: 2018-06-01

SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

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AI-Extracted Technical Summary

Problems solved by technology

[0011] The invention provides a method for adjusting the inclination angle of the light beam, which is used to solve the requirement that the LED annular dark field illumination device and the optical fiber annular dark field ill...

Method used

Described angle regulator comprises wedge prism 3 and is used to control described wedge prism 3 to rotate along its axis rotation adjustment mechanism 4, and described wedge prism 3 is positioned at the rear focal plane of described collimator lens 2, and described The rotation adjustment mechanism 4 controls the rotation of the wedge prism 3 along its axis to achieve angular deflection of the light beam. The heights of the collimating lens 2 and the wedge prism 3 in this embodiment are both less than 15mm, and their heights meet the axial size constraints (<30mm) of the subsequent defect detection equipment, and have good adaptability.

Take one group of lighting mechanism as example, carry out unipolar illumination, after the light beam that light source 1 exits passe...

Abstract

The invention discloses a method for adjusting the inclination angle of light beams. The method comprises steps as follows: S1, the light beams are collimated by a collimating lens, and the divergenceangle of light rays in the collimated light beams is smaller; S2, the inclination angle of the collimated light beams is adjusted by an angle regulator. The angle consistency of the light beams is improved, the uniformity of the illumination field of view is improved, the operation is simple and the production efficiency is improved. The invention also discloses an illumination device for adjusting the inclination angle of the light beams. The illumination device comprises at least one illumination mechanism, wherein the illumination mechanism comprises a light source, the collimating lens and the angle regulator which are arranged in the light ray propagation direction, light beams emitted by the light source are adjusted by the collimating lens to become parallel light beams, then, thelight beams are adjusted by the angle adjuster, angle deflection of the light beams is realized, the light beams are irradiated to the surface of a to-be-detected panel, and the large-angle oblique incidence illumination effect is realized.

Application Domain

Optically investigating flaws/contamination

Technology Topic

PhysicsOptoelectronics +5

Image

Examples

Experimental program(3)

Example Embodiment

[0045] Example 1

[0046] A method for adjusting the tilt angle of a light beam, comprising the following steps:

[0047] Step 1: Use a collimating lens to collimate the beam, and the beam after collimation has a smaller divergence angle of the light in the beam;

[0048] Step 2: Use an angle adjuster to adjust the inclination angle of the collimated beam by means of reflection adjustment or refraction adjustment.

Example Embodiment

[0049] Embodiment 2

[0050] See Figure 12 , an illuminating device for adjusting the inclination angle of a light beam, comprising four groups of illuminating mechanisms, the illuminating mechanism includes a light source 1, a collimating lens 2 and an angle adjuster arranged along the light propagation direction, the light source 1 emits a light beam through the collimating The straight lens 2 is adjusted to be a parallel light beam, and then the light beam is adjusted by the angle adjuster to realize the angle deflection of the light beam, and incident on the surface of the flat plate 5 to be measured, so as to achieve a large-angle oblique incident illumination effect.

[0051] The angle adjuster includes a wedge-shaped prism 3 and a rotation adjustment mechanism 4 for controlling the wedge-shaped prism 3 to rotate along its axis. The wedge-shaped prism 3 is located at the back focal plane of the collimating lens 2. 4. Control the wedge prism 3 to rotate along its axis to realize beam angle deflection. The heights of the collimating lens 2 and the wedge prism 3 in this embodiment are both less than 15 mm, and their heights meet the axial size constraints (<30 mm) of the subsequent defect detection equipment, and have good adaptability.

[0052] The collimating lens 2 is an aspherical mirror, a spherical mirror or other optical element that can collimate the light beam. The light beam becomes parallel light after passing through the collimating lens 2, and the divergence angle of the light beam is very small.

[0053] The light source 1 is a laser or a fiber optic lighting system. When the light source 1 is a fiber optic lighting system, the fiber optic lighting system uses a single fiber, which is simple to assemble and improves energy utilization.

[0054] Taking a group of lighting mechanisms as an example, to perform unipolar lighting, after the light beam emitted by the light source 1 passes through the collimating lens 2, the light beam becomes parallel light, and the divergence angle of the light in the light beam is very small, and the wedge prism 3 realizes the light beam. The angle deflection is incident on the surface of the flat panel 5 to be tested, so as to achieve a large-angle oblique incident illumination effect, the angular deviation range of the light in the beam is less than 1 degree, and the consistency is high; through the rotation adjustment mechanism 4, the wedge prism is rotated and adjusted 3. Rotate to adjust the angle between the light beam incident on the surface of the flat panel 5 to be tested and the surface of the flat panel 5 to be tested, so as to realize the angle adjustment of the monopole illumination.

[0055] Figure 13 Indicates that the light intensity distribution of the light beam passing through the collimating lens 2 and incident on the front surface of the wedge prism 3, its uniformity in the Φ17mm field of view is about 97.3%, and the divergence angle of the light in the beam is less than 0.8 degrees, that is, the beam angle The consistency is high, and the deviation range can reach less than 1 degree.

[0056] According to the design requirements, the focal length of the field of view and the collimating lens 2 and the NA of the light source 1 are satisfied: if the field of view requirement is a square with a width of Dmm, then 2F×sin(NA)≥D, F is the focal length of the collimating lens 2, NA is the numerical aperture of the light source.

[0057] According to the angle between the designed light beam and the surface of the flat plate 5 to be measured, the light beam emitted by the measuring light source 1 is adjusted by the collimating lens 2 and the wedge prism 3 and irradiated on the surface of the flat plate 5 to be measured. The included angle and the consistency of the beam angle meet the design requirements. If it does not meet the design requirements, adjust the rotation of the wedge prism 3 until it meets the design requirements.

[0058] Rotating the wedge prism 3 along the axis of the wedge prism 3 can adjust the angle of the beam incident on the surface of the plate 5 to be measured. The relationship between the incident angle of the beam and the rotation angle is:

[0059] θ=arc(n sin(α-β))+Δα;

[0060] in, θ represents the angle between the light beam and the surface of the plate 5 to be measured, α represents the complementary angle of the wedge angle of the wedge prism 3, Δα represents the rotation angle of the wedge prism 3, n is the refractive index of the wedge prism material, and the adjustment range is as follows :

[0061] Table 1

[0062] Adjusted Δα(Degree)

[0063] As can be seen from the above table, the wedge prism 3 is rotated 20° along its axial direction, and the range of the incident angle of the adjustable beam is 1.3°. When the wedge prism 3 rotates along its axis, the translation of the field of view along the axis of the wedge prism 3 will be generated, and the translation amount is Its axis needs to be adjusted To compensate for the offset of the field of view caused by the adjustment angle, the center of the field of view remains unchanged.

[0064] If the consistency of the beam angle does not meet the design requirements, when the angle between the beam and the surface of the plate 5 to be measured is greater than the angle required by the design, adjust the wedge prism 3 so that the angle between the beam and the surface of the plate 5 to be measured becomes smaller. The measuring plate 5 needs to translate upward along its axis; when the angle between the beam and the surface of the plate 5 to be measured is smaller than the angle required by the design, adjust the wedge prism 3 to make the angle between the beam and the surface of the plate 5 to be measured become larger, and the angle between the beam and the surface of the plate 5 to be measured becomes larger. The measuring plate 5 needs to be translated downward along its axis.

[0065] The lighting simulation effect on the surface of the panel 5 to be tested is shown in Figure 14 and Figure 15 , Figure 15 express Figure 14 The enlarged view of the light intensity in the middle field of view. The designed incident angle θ is 14 degrees. The analysis shows that the maximum angle of the beam incident on the surface of the plate 5 to be measured is about 14.3 degrees, and the minimum angle is 13.5 degrees. The angle deviation of the light in the beam is <1 The uniformity of the beam angle is improved; the illumination uniformity of the 12mm×12mm area in the center of the field of view is 95.4%, which improves the illumination uniformity of the monopole illumination.

[0066] See Figure 16 , using four sets of lighting mechanisms to perform multi-pole lighting, see the lighting simulation effect on the surface of the flat panel 5 to be tested. Figure 17 and Figure 18 , Figure 18 express Figure 17 The enlarged view of the light intensity in the middle field of view shows that the uniformity of illumination in the 12mm×12mm area in the center of the field of view is 95.4%. The uniformity of the angle of the polar illumination light improves the uniformity of the intensity of each monopole illumination light received at different positions in the illumination field of view, and the uniformity is 95.4%.

Example Embodiment

[0067] Embodiment 3

[0068] See Figure 19 The difference between the third embodiment and the second embodiment is that the angle adjuster is a micro-mirror array 6, and after the light beam emitted by the light source 1 passes through the collimating lens 2, the light beam becomes parallel light, and the divergence angle of the light in the light beam is very large. The angle of the light beam is deflected through the micro-mirror array 6 and incident on the surface of the flat panel 5 to be tested, so as to achieve a large-angle oblique incident illumination effect, and the angular deviation range of the light in the light beam is less than 1 degree. By adjusting the micro-mirror array 6 , the angle adjustment of the incident light beam on the surface of the flat plate 5 to be measured is realized.

PUM

Property	Measurement	Unit
Height	<= 15.0	mm
Divergence angle	<= 0.8	deg

Description & Claims & Application Information

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Classification and recommendation of technical efficacy words

improve consistency
Improve uniformity

Method for adjusting inclination angle of light beams and illumination device for adjusting inclination angle of light beams

A technology of beam inclination and lighting device, which is used in measurement devices, optical testing of flaws/defects, material analysis by optical means, etc. performance, simplicity of operation, and improved consistency

AI-Extracted Technical Summary

Problems solved by technology

Method used

Abstract

Image

Examples

Example Embodiment

Example Embodiment

Example Embodiment

PUM

Description & Claims & Application Information

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