Silicon wafer inserting device, silicon wafer cleaning equipment and silicon wafer cleaning method

Abstract

The invention provides a silicon wafer inserting device, which comprises a feeding unit and an inserting unit which communicate with each other, wherein the feeding unit is used for transmitting silicon wafers to the inserting unit one by one; the silicon wafer inserting device also comprises a cleaning unit located between the feeding unit and the inserting unit; and the cleaning unit is used forcarrying out cleaning treatment on the silicon wafers before entering the inserting unit. Silicon wafer cleaning equipment comprises a silicon wafer cleaning device and the silicon wafer inserting device. According to a silicon wafer cleaning method, cleaning is carried out by using the silicon wafer cleaning equipment, and the silicon wafer cleaning method comprises the steps of transmitting thesilicon wafers by using the feeding unit; cleaning the silicon wafers by using the cleaning unit; transmitting the silicon wafers subjected to cleaning treatment to the inserting unit for inserting;and cleaning the inserted silicon wafers by using the silicon wafer cleaning device. According to the silicon wafer inserting device, the silicon wafer cleaning equipment and the silicon wafer cleaning method, the silicon wafers before entering the inserting unit are subjected to cleaning treatment by using the cleaning unit, so that dirt on the surface is reduced and the standing time of the silicon wafers in a cleaning tank can be greatly shortened.

Description

technical field [0001] The invention belongs to the technical field of solar cell manufacturing, and in particular relates to a silicon wafer insertion device, a silicon wafer cleaning device with the silicon wafer insertion device, and a silicon wafer cleaning method. Background technique [0002] With the continuous development of the world economy, the demand for high-efficiency energy in modernization is increasing. Photovoltaic power generation, as a green energy source and a major energy source for the sustainable development of human beings, has been increasingly valued by countries all over the world and has been vigorously developed. Cells with silicon wafers as the main body are mainstream products in the field of solar cells, and the required silicon wafers are obtained by slicing square or quasi-square silicon ingots or silicon rods. The multiple silicon wafers obtained by slicing are stacked together, and need to be sliced ​​and inserted. The multiple silicon w...

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Problems solved by technology

[0004] The object of the present invention is to provide a silicon wafer inserting device, which solves the problem that the cleaning effect is not good due to the too close distance between two adjacent silicon wafers when the existing silicon wafer is inserted.

[0005] The purpose of the present invention is also to provide a silicon wafer cleaning equipment, which solves the shortcoming that the existing silicon wafer cleaning equipment needs to prolong the cleaning time because the distance between the silicon wafers is too close

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