Thin film hydrogen sensor with self-heating function and temperature compensation function

Abstract

The invention discloses a thin film hydrogen sensor with a self-heating function and a temperature compensation function. The thin film hydrogen sensor comprises a shell, a top cover, a sensor chip and an adapter circuit board. The adapter circuit board is arranged on the bottom part of an inner cavity of the shell; the sensor chip is arranged on the adapter circuit board; a welding plate is arranged on the adapter circuit board; a terminal of the sensor chip is connected with the welding plate; an inner end of a cable penetrates through a cable hole so as to be connected with the welding plate; the sensor chip is sequentially provided with a base layer, an insulation layer, a lower-layer hydrogen resistance layer, a heating / temperature measuring layer, an upper-layer hydrogen resistance layer, a hydrogen sensitive layer and an anti-oxidation layer from bottom to top; the heating / temperature measuring layer is provided with a temperature measuring resistance wire and a heating resistance wire; the hydrogen sensitive layer is provided with a hydrogen sensitive resistance wire. According to the thin film hydrogen sensor provided by the invention, the heating resistance wire is arranged on the sensor chip, so that the sensor chip has a self-heating function; the sensor chip is packaged into a sealed inner cavity of the shell, so that a temperature compensation function is conveniently improved, and the measurement accuracy is improved; through arranging the adapter circuit board, the thin film hydrogen sensor is convenient to apply.

Description

technical field [0001] The invention relates to a thin-film hydrogen sensor, in particular to a thin-film hydrogen sensor with self-heating and temperature compensation functions, which can also be applied to the measurement of hydrogen between micro-gap layers by adopting different packaging and switching methods. Background technique [0002] As a new type of clean energy, hydrogen is widely used in industrial production and military aviation, but it is also a dangerous gas. When its concentration is higher than 4%, it is very easy to explode, threatening production and personnel safety. Therefore, whether it is in the production, storage, transportation and use of hydrogen energy as fuel cell hydrogen in the development of new energy, or in the safety detection of hydrogen fuel in the aviation industry, as well as the prevention of hydrogen leakage accidents in the nuclear power industry, the rapid warning of hydrogen explosion and the disposal of nuclear waste Reliable h...

AI Technical Summary

Problems solved by technology

However, the thin-film hydrogen sensor has strong temperature sensitivity characteristics, and the small ambient temperature fluctuations of the ambient temperature and the surrounding air and the large airflow fluctuations during inflation and deflation will bring great errors to the measurement.

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