The invention discloses a thin film
hydrogen sensor with a self-heating function and a temperature compensation function. The thin film
hydrogen sensor comprises a shell, a top cover, a sensor
chip and an adapter circuit board. The adapter circuit board is arranged on the bottom part of an inner cavity of the shell; the sensor
chip is arranged on the adapter circuit board; a
welding plate is arranged on the adapter circuit board; a terminal of the sensor
chip is connected with the
welding plate; an inner end of a cable penetrates through a cable hole so as to be connected with the
welding plate; the sensor chip is sequentially provided with a base layer, an
insulation layer, a lower-layer
hydrogen resistance layer, a heating / temperature measuring layer, an upper-layer hydrogen resistance layer, a hydrogen sensitive layer and an anti-oxidation layer from bottom to top; the heating / temperature measuring layer is provided with a temperature measuring
resistance wire and a heating
resistance wire; the hydrogen sensitive layer is provided with a hydrogen sensitive
resistance wire. According to the thin film
hydrogen sensor provided by the invention, the heating resistance wire is arranged on the sensor chip, so that the sensor chip has a self-heating function; the sensor chip is packaged into a sealed inner cavity of the shell, so that a temperature compensation function is conveniently improved, and the measurement accuracy is improved; through arranging the adapter circuit board, the thin film
hydrogen sensor is convenient to apply.