Annular circulation continuous vacuum coating device

Abstract

The invention relates to an annular circulation continuous vacuum coating device which comprises a main cavity, a main vacuum system and coating technology assemblies, wherein the main cavity is provided with a main chamber and a feeding hole capable of being opened and closed; the annular circulation continuous vacuum coating device further comprises a rotary disc, a rotary disc lifting mechanism, a rotary disc rotating mechanism, a feeding chamber, a plurality of technological chambers and a feeding sub chamber vacuum system; the rotary disc rotating mechanism drives the rotary disc to rotate horizontally to transmit a to-be-coated workpiece among the feeding chamber and all technological chambers; the rotary disc lifting mechanism drives the rotary disc to go up and down to switch overthe feeding chamber and the technological chambers between the communicating state of the main chamber and the state of an independent vacuum chamber; the main vacuum system carries out vacuum treatment on the main chamber and all technological chambers; the feeding sub chamber vacuum system carries out vacuum treatment on the feeding chamber separately; and different coating technology assembliesare mounted on all technological sub cavities to realize different coating functions. The annular circulation continuous vacuum coating device can realize annular circulation continuous and low-costcoating production in the vacuum cavity.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating equipment, in particular to an annular circulation continuous vacuum coating device. Background technique [0002] Existing vacuum coating equipment can be divided into single-type coating machines and continuous coating equipment according to the number of vacuum chambers in the vacuum equipment. [0003] The single-body coating machine usually consists of a vacuum chamber and an exhaust system. The vacuum coating process module is loaded on the chamber. When the required vacuum degree is reached, the required vacuum coating process module is activated to realize the processing of the material surface. , the single cavity leads to the need to open and close the door when the product is in and out, and the product cannot be continuously produced, which will greatly reduce the production efficiency and increase the labor cost, and the discontinuity of production will increase the product dif...

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Problems solved by technology

[0006] The structure of the linear continuous vacuum coating equipment is complicated. Multiple independent coating chambers need to be equipped with multiple high vacuum pump sets. The use of a large number of gates increases the production cost, production time, and production space. The complex equipment increases the difficulty of driving the workpiece to be coated. , the existence of m

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