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Contact plate and evaporation equipment

A contact plate and evaporation technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of low resistance of metal electrodes, high density of metal materials, poor white point display, etc. Uniformity, rapid heat dissipation, improvement of poor white point display effect

Active Publication Date: 2018-06-29
BOE TECH GRP CO LTD +1
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Problems solved by technology

During the evaporation of metal electrodes, metal atoms will gather to the area with higher temperature during the diffusion deposition process, so the density of the metal material deposited on the substrate to be evaporated at the position of the small hole is higher than that at other positions, making the metal electrode at this position The resistance of the substrate is relatively low. When the substrate is in the energized working state, the current at this position is relatively large, so the brightness is higher, and white spots will be formed visually.

Method used

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  • Contact plate and evaporation equipment
  • Contact plate and evaporation equipment
  • Contact plate and evaporation equipment

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Embodiment Construction

[0036] In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0037] Such as figure 1 As shown, the existing evaporation machine mainly includes an evaporation source 5 , a fine metal mask plate 4 , a magnetic plate 1 and a contact plate 2 . Wherein, when the substrate to be evaporated 3 is evaporated, the contact plate 2 is located between the magnetic plate 1 and the substrate to be evaporated 3, and is in contact with the substrate to be evaporated 3, and its main function is to dissipate heat and ensure the stability of the substrate to be evaporated 3 Contact flatness; the fine metal mask plate 4 is located on the side of the substrate to be evaporated 3 facing away from the contact plate 2, and its main function is to provide a mask for depositing organic materials and metal materials; the ...

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Abstract

The invention provides a contact plate and evaporation equipment and belongs to the technical field of display. The contact plate is applied to the evaporation equipment and is used for supporting a to-be-evaporated substrate; the contact plate comprises a bottom plate and a plurality of support parts at the same height on the bottom plate. By means of the technical scheme, poor white dot displaycan be relieved on the premise that good heat dissipation of the to-be-evaporated substrate is guaranteed in the heating process of an evaporation source.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a contact plate and evaporation equipment. Background technique [0002] The existing evaporation machine mainly includes evaporation source, fine metal mask plate, magnetic plate and contact plate. Among them, when the substrate to be evaporated is evaporated, the contact plate is located between the magnetic plate and the substrate to be evaporated, and is in contact with the substrate to be evaporated. The main function is to dissipate heat and ensure the contact flatness of the substrate to be evaporated; fine metal The mask plate is located on the side of the substrate to be evaporated facing away from the contact plate, and its main function is to provide a mask for depositing organic materials and metal materials; the evaporation source is located on the side of the fine metal mask facing away from the substrate to be evaporated, mainly The function is to evaporate organ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50C23C14/24
CPCC23C14/24C23C14/50
Inventor 白清云
Owner BOE TECH GRP CO LTD
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