Free-form surface non-contact dimensionality-reducing error-separating detection method and device
A technology of error separation and detection method, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the limitation of free-form surface contour measurement accuracy, insufficient measurement accuracy, and inability to overcome characteristic differences such as sample surface roughness, undulations, and inclination angles, etc. problem, to achieve the effect of nanoscale feed resolution and positioning, improve the measurement range, and improve the accuracy
Active Publication Date: 2018-06-29
BEIJING INSTITUTE OF TECHNOLOGYGY
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[0006] To sum up, the existing measurement methods mainly have insufficient measurement accuracy, which cannot overcome the influence of sample surface roughness, undulation, inclination and other characteristic differences, which is the main bottleneck that currently limits the measurement accuracy of free-form surface contours.
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Embodiment 1
[0032] Such as figure 1 As shown, the device of the present invention includes: active air bearing vibration isolation spring, air bearing vibration isolation base, X direction air bearing guide rail, gantry frame, spectral confocal distance measurement sensor, laser interference displacement measurement mirror group, Y direction air bearing Guide rail, Z-direction air bearing guide rail, free-form surface sample attitude adjustment device, reference flat crystal attitude adjustment device, laser interferometer;
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The invention belongs to the technical field of optical precision detection, relates to a free-form surface non-contact dimensionality-reducing error-separating detection method and device, and the method can be used for the nano-precision detection of the free-form surface part morphology and comprises the following steps of using a high-precision plane parallel plate as a standard reflector, reducing the influence of X-direction and Y-direction air floatation guide rail straightness to the high-precision detection of a free-form surface outline, thereby reducing 21 items of errors of a three-coordinate measuring machine; and using a non-contact height-measuring sensor to rapidly collect height information of the free-form surface outline. Adopting a method of adjusting the posture of a detected free-form surface part by using a spherical air floatation workbench with a three-point support structure, through adjusting the posture of the free-form surface part, thereby improving an inclination detection range of the free-form surface part outline. The device comprises an active air floatation shock-insulating spring, an air floatation shock-insulating substrate, an X-direction airfloatation guide rail, a Y-direction air floatation guide rail, a portal frame, the non-contact height-measuring sensor, a laser interference displacement measuring lens group, a Z-direction air floatation guide rail, a free-form surface sample posture adjusting device, a reference parallel plate posture adjusting device and a laser interferometer.
Description
technical field [0001] The invention belongs to the technical field of optical precision detection, and relates to a high-precision detection method and device for free-form surfaces, which can be used for nano-precision detection of free-form surfaces in precision optical systems. technical background [0002] The free-form surface element has the largest degree of freedom in surface morphology, and it is easy to eliminate aberrations in the imaging system. It can greatly improve the imaging quality and resolution of the measurement optical system, and improve the performance of weapons and equipment; use the free-form surface optical system to replace the previous optical system composed of plane, spherical mirror, coaxial quadric mirror, etc. to improve Imaging quality, reducing the volume and weight of the system, and then solving the problems of imaging accuracy, portability and reliability have become an important trend in the development of optical systems. [0003] ...
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IPC IPC(8): G01B11/24G01B11/00
CPCG01B11/005G01B11/2441
Inventor 赵维谦唐颖奇邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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