Device and method for peeling two substrates
A technology of substrates and flexible substrates, which is applied in the manufacture of electrical components, electrical solid devices, semiconductor/solid devices, etc., can solve problems such as lower yield rate and component damage, and achieve the effect of improving yield rate
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[0053] In order to describe the technical content, structural features, achieved goals and effects of the present invention in detail, examples are given below to illustrate in detail with the help of drawings.
[0054] See Figures 1 to 12 . figure 1 It is a perspective view of the device 1 for peeling two substrates in a preferred embodiment of the present invention; figure 2 for figure 1 The top view of the device 1 for peeling two substrates; image 3 for along figure 2 Sectional view taken on section line A-A of ; Figure 4 for along figure 2 The sectional view taken on the B-B section line of ; Figures 5 to 6 for figure 1 A perspective view of the cutter 203 of the device 1 for peeling two substrates; Figure 7 for figure 1 A perspective view of the carrier tilting part 103 of the device 1 for peeling off two substrates; Figure 8 for figure 1 A stereoscopic view of the ion wind generator 104 of the device 1 for peeling off two substrates; Figure 9 ...
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