Online detection method for surface shape of reflector

A technology of reflective mirror surface and detection method, which is applied in the direction of measuring devices, instruments, and optical devices, etc., can solve the problems of long scanning time, etc., and achieve the effects of improving efficiency, facilitating integration, and improving preparation accuracy

Inactive Publication Date: 2018-07-17
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

The point-by-point scanning online detection method not only takes a long time to scan, but its scanning accuracy also

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  • Online detection method for surface shape of reflector
  • Online detection method for surface shape of reflector
  • Online detection method for surface shape of reflector

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[0024] In order to make those skilled in the art better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only Embodiments are part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0025] The terms "first", "second", "third", "fourth", etc. (if present) in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to Describe a particular order or sequence. It is to be understood that data so used may be interchanged under approp...

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Abstract

The embodiment of the invention discloses an online detection method for the surface shape of a reflector. On the basis of the principle of stripe reflection, a stripe image with ideal periodic changeis displayed through a display, a stripe image formed by the reflection of a reflector machined by an ultra-precision cutting machine is collected through an aperture camera, the surface shape of thereflector is judged and reconstructed according to the curvature of the stripe image, and thus, online detection of the surface shape of the reflector is completed. By using the online detection method for the surface shape of a reflector provided by the embodiment of the invention, a reflector with any smooth continuous surface shape can be detected without optical compensation device or precision position adjustment. The method has a greater dynamic range than the existing online detection method based on a laser interference detector, and takes shorter time and is less affected by the precision of the machine tool and the environmental conditions than the existing online detection method based on point-by-point ranging and scanning by a contact or non-contact sensor.

Description

technical field [0001] The invention relates to the technical field of reflection mirror surface shape detection, in particular to an online detection method of reflection mirror surface shape processed on an ultra-precision cutting machine tool. Background technique [0002] Due to the micron-level machining accuracy of ultra-precision cutting machine tools, ultra-precision cutting machine tools have been widely used in optical components and mold processing and other fields. The machining accuracy of ultra-precision cutting machine tools mainly depends on the accuracy of the machine tool spindle and guide rail itself, and there is a lack of real-time accuracy detection and correction measures during the machining process. The traditional offline detection method is not only time-consuming, but also causes positioning errors due to repeated iterative disassembly and assembly, which affects the accuracy of the processing of the emitting mirror surface. [0003] At present, ...

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Application Information

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IPC IPC(8): G01B11/25
CPCG01B11/2545
Inventor 陶小平张学军张志宇
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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