Vacuum film pasting apparatus and method
A film sticking device and vacuum technology, which is applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of bonding strength influence, poor bonding, etc., to improve air density, improve yield, improve quality and yield Effect
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[0099] see Figure 1 to Figure 3 As shown, it is a schematic diagram of a vacuum film sticking device 10 according to a preferred embodiment of the present invention, wherein figure 1 and figure 2 The top plate 111 of the cavity 110 is not shown in order to view the internal structure of the vacuum film sticking device 10 . The vacuum laminating device 10 may include a vacuum chamber module 100 , a lamination module 200 , a carrying module 300 and a heating platform 400 , and the technical contents of these components are described in sequence as follows.
[0100] The vacuum chamber module 100 can provide a vacuum environment for vacuum film lamination, and its structure can include a cavity 110, an airtight sliding bearing 120 and a vacuum system control device 130, the airtight sliding bearing 120 and the control device 130 are all disposed on the cavity 110 .
[0101] Specifically, the cavity 110 defines an accommodating space 110A, and the pressure therein is controlla...
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