A Micro Device and Method for Realizing Frequency Tracking of Ultrasonic Motor

Abstract

The invention relates to a miniature device and method for tracking ultrasonic motor frequency. The miniature device comprises a control module, a motor drive module, an impedance matching module, a temperature sensor module, a phase detection module and a voltage effective value detection module, wherein the control module comprises a miniature single-chip microcomputer or a DSP chip; the motor drive module is used for generating two square wave voltage signals with adjustable frequency, phase difference and voltage value; the impedance matching module adopts a variable inductor; the temperature sensing module is used for measuring temperature during motor operation in real time; the phase detection module is used for detecting phase difference between motor excitation voltage and collected voltage; the voltage effective value detection module is used for reflecting the vibration state of the motor. The miniature device has the advantages that ultrasonic motor rotation speed stabilityis increased, ultrasonic motor miniaturization can be promoted favorably, and an ultrasonic device integrated with the miniature drive control device is hopefully applied to fields such as micro-robots and in-vivo medical treatment with large system dimension limitation.

Description

technical field [0001] The invention relates to the field of ultrasonic motors, in particular to a micro-device and method for realizing frequency tracking of ultrasonic motors. Background technique [0002] Ultrasonic motor is a new type of motor developed in recent years. It uses the inverse piezoelectric effect of piezoelectric ceramics and ultrasonic vibration to convert the microscopic deformation of piezoelectric ceramics into macroscopic motion of the rotor or slider through resonance amplification and friction coupling. Due to the unique operating mechanism, the ultrasonic motor has the advantages that the traditional electromagnetic motor does not have, such as small size, light weight, low speed and high torque, no electromagnetic interference, low noise, high control precision, fast response speed, etc., in discontinuous There are broad application prospects in the field of motion and precision control. However, in order to obtain a larger output torque, the ultr...

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Problems solved by technology

[0003] However, at present, there are two main ways to realize the automatic frequency tracking control of ultrasonic motors: one is to use the piezoelectric ceramic lone pole attached to the stator to reflect the vibration state of the stator through its feedback voltage, also known as the sensor-based frequency tracking method, it is not suitable for ultrasonic motors that cannot install or construct sensors, and the piezoelectric ceramic lone pole can only be used to reflect the vibration state of the stator, resulting in a waste of materials

At the same time, this method is only suitable for frequency tracking of traveling wave ultrasonic motors, and its applicable range is narrow

The other is to use the drive state of the motor's drive voltage, current phase, etc., also known as the sensorless frequency tracking method, but this method requires more stringent conditions, the realization of the circuit is more complicated and the selection of parameters is also more difficult

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