DLC film layer preparation method accurately controlling thickness of DLC film layer

Abstract

The invention relates to a DLC film layer preparation method accurately controlling the thickness of a DLC film layer. The DLC film layer preparation method comprises the following steps that (1), multiple cleaning is performed on a wear-resistant part; (2), the cleaned wear-resistant part is dried in an atmosphere of N2; (3), the dried wear-resistant part is placed inside a vacuum cavity, vacuum-pumping treatment is performed on the vacuum cavity till the vacuum degree of the vacuum cavity is higher than 1*10<-6> mbar, and DLC film plating is started; (4), Ar gas ions are adopted to bombard the wear-resistant part; (5), DLC film layer sedimentation is performed on the surface of the wear-resistant part adopting normal hexane and tetramethylsilane; (6), after DLC film layer sedimentation is performed and after vacuum breaking and cooling to room temperature are performed, the wear-resistant part is taken out, and the thickness of the DLC film layer is measured. By means of the DLC filmlayer preparation method accurately controlling the thickness of the DLC film layer, the thickness of the DLC film layer can be accurately controlled, the fit clearance of friction pairs of the wear-resistant part is guaranteed, furthermore, the assembly grinding machining working procedure does not need to be performed, the assembly time is saved, and the assembly efficiency of special equipmentparts is improved.

Description

technical field [0001] The invention relates to the technical field of wear-resistant parts of special equipment, in particular to a DLC film preparation method for precisely controlling the thickness of the DLC film. Background technique [0002] At present, in the field of tribology, the thickness of the DLC film deposited on the surface of the wear-resistant parts of special equipment cannot be accurately controlled, which leads to the failure to guarantee the fit clearance between the friction pairs corresponding to the wear-resistant parts, resulting in friction The pair should be ground again to ensure the gap between the friction pairs. The grinding process increases the time required for the assembly of the entire special equipment parts, reduces the assembly efficiency of the entire special equipment parts, and affects the production progress. Contents of the invention [0003] The purpose of the present invention is to provide a method for preparing a DLC fil...

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Problems solved by technology

[0002] At present, in the field of tribology, the thickness of the DLC film deposited on the surface of the wear-resistant parts of special equipment cannot be accurately controlled, which leads to the failure to guarantee the fit clearance between the friction pairs corresponding to the wear-resistant parts, resulting in friction The pair is re-grinded to ensure the gap between the friction pairs. The grinding process increases the time required for the assembly of the entire special equipment parts, reduces the assembly efficiency of the entire special equipment parts, and affects the production schedule.

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