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A microstrip silicon-based microwave filter based on porous silicon and its manufacturing method

A microwave filter and porous silicon technology, applied in waveguide devices, circuits, electrical components, etc., can solve the problems that the insertion loss of MEMS microwave filters does not reach the excellent standard, and the cost of high-resistance silicon substrates is high.

Active Publication Date: 2020-02-07
NAT CENT FOR ADVANCED PACKAGING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the cost of the high-resistance silicon substrate is relatively high, and the insertion loss of the MEMS microwave filter based on high-resistance silicon has not yet reached an excellent standard

Method used

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  • A microstrip silicon-based microwave filter based on porous silicon and its manufacturing method
  • A microstrip silicon-based microwave filter based on porous silicon and its manufacturing method
  • A microstrip silicon-based microwave filter based on porous silicon and its manufacturing method

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Embodiment Construction

[0046] In the following description, the present invention is described with reference to various examples. One skilled in the art will recognize, however, that the various embodiments may be practiced without one or more of the specific details, or with other alternative and / or additional methods, materials, or components. In other instances, well-known structures, materials, or operations are not shown or described in detail so as not to obscure aspects of the various embodiments of the invention. Similarly, for purposes of explanation, specific quantities, materials and configurations are set forth in order to provide a thorough understanding of embodiments of the invention. However, the invention may be practiced without these specific details. Furthermore, it should be understood that the various embodiments shown in the drawings are illustrative representations and are not necessarily drawn to scale.

[0047] In this specification, reference to "one embodiment" or "the...

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PUM

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Abstract

The invention discloses a porous-silicon-based micro-strip silicon-based microwave filter comprising a silicon substrate, a silicon through hole formed in the silicon substrate, a porous silicon layerarranged on the silicon substrate, an insulating layer arranged on the porous silicon layer, an input and / or output interface arranged on the insulating layer, and a filter electrode arranged on theinsulating layer.

Description

technical field [0001] The invention relates to the technical field of microwave filters, in particular to a porous silicon-based microstrip silicon-based microwave filter and a manufacturing method. Background technique [0002] Filters are an essential part of radio frequency microwave systems, and filter modules with excellent performance are a necessary prerequisite for the normal operation of radio frequency microwave communication systems. Although the traditional microwave filter has good performance in terms of parameters, its huge size not only makes the corresponding microwave communication system more bulky, but also increases the product cost. [0003] For more than two decades, with the gradual maturity of MEMS (micro-electromechanical systems) technology and MEMS devices, opportunities have been provided for the miniaturization and integration of microwave filters. Compared with the traditional VLSI process, MEMS technology can realize the miniaturization and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P1/203H01P11/00
CPCH01P1/20336H01P11/007
Inventor 欧毅李志刚蒋文静欧文张文奇曹立强
Owner NAT CENT FOR ADVANCED PACKAGING CO LTD