Array sensor integrated chip for biochemical analysis and preparation method thereof
An integrated chip and biochemical analysis technology, which is applied in the fields of analyzing materials, semiconductor/solid-state device manufacturing, and material analysis through electromagnetic means, etc., can solve the measurement error of ISFET weak stability ISFET and ISFET sensor, and affect the measurement of biological or chemical substances Accuracy and other issues, to achieve the effect of facilitating promotion and application, reducing cross-contamination, and reducing measurement errors
Inactive Publication Date: 2018-09-21
CHONGQING UNIV OF EDUCATION
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Problems solved by technology
[0004] Although the existing ISFET-based array sensor can carry out synchronous measurement on multiple target sample solutions, due to the weak stability of the ISFET itself (that is, the work of the ISFET is easily affected by the environment, salts or gases in the surrounding environment Once it enters the sample solution, it will affect its stability), and in a large-scale ISFET sensor array, the sample solution in contact with adjacent sensors is prone to cross-contamination and electrical noise crosstalk, which makes the measurement results of each ISFET sensor There are problems with large errors, which affect the measurement accuracy of biological or chemical substances
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Embodiment 1
[0038] Such as Figure 1~3 As shown, the array sensor integrated chip for biochemical analysis provided in this embodiment includes a substrate layer 1 and several ISFET sensors 2 formed on the substrate layer 1, wherein the ISFET sensors 2 are not A density of less than 100 sensors / mm2 is arranged in a planar array of not less than 100 sensors.
[0039]The ISFET sensor 2 includes a pair of ISFET field effect transistors 3 and REFET field effect transistors 4 arranged symmetrically in left and right mirror images, wherein a chemically sensitive film layer 302 is formed above the gate isolation layer 301 of the ISFET field effect transistors 3 , an inactive film layer 402 is formed above the gate isolation layer 401 of the REFET field effect transistor 4 .
[0040] A liquid sample holding hole 6 for exposing the chemically sensitive film layer 302 and the inactive film layer 402 and surrounded by the first packaging material layer 501 is formed above the central area of the ...
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The invention relates to the field of a semiconductor chip and discloses an array sensor integrated chip for biochemical analysis and a preparation method thereof. According to the array sensor integrated chip for biochemical analysis and the preparation method thereof, on one hand, by configuring one mirror-symmetrical REFET for an ISFET, and setting a reference electrode of the two transistors on a symmetrical center line to realize sharing, the sensitive response result of the REFET can be used as a reference to exclude the influence of ambient temperature, electric field noise and other non-sample solution factors, and stability of ISFET sensors is improved; and on the other hand, by providing a separate liquid sample holding hole for each ISFET sensor, fluidity adjacent sample solutions can be blocked by utilizing elevation hole walls, thereby reducing the cases of cross contamination and electrical noise crosstalk and the like, furthermore, effectively reducing measurement errorof each ISFET sensor, and ensuring measurement accuracy of biological or chemical substances.
Description
technical field [0001] The invention belongs to the field of semiconductor chips, and in particular relates to an array sensor integrated chip for biochemical analysis and a preparation method thereof. Background technique [0002] In the existing fields of clinical medicine, new drug development, environmental monitoring, and detection of toxic substances, it is generally necessary to quickly and accurately measure biological or chemical substances, so that the core component of the biosensor-ion-sensitive field-effect transistor (English abbreviation It is an ISFET, which has the same structure as a MOS field effect transistor, except that it replaces the metal gate G of the MOS field effect transistor with a chemically sensitive film, a sample solution and a reference electrode G) in biological or chemical analysis wide application and rapid development. [0003] Compared with the traditional ion selective electrode (abbreviated as ISE), ISFET has the following advantage...
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IPC IPC(8): H01L27/10H01L21/822G01N27/414
CPCG01N27/414H01L21/822H01L27/10
Inventor 王存熊政委
Owner CHONGQING UNIV OF EDUCATION