Method for increasing hardness and wear resistance of ultra-thin glass
An ultra-thin glass and wear-resistant technology, applied in the field of ultra-thin glass manufacturing, can solve the problems of complex chemical tempered glass process, inability to temper ultra-thin glass, difficult to temper glass, etc., and meet the requirements of transmittance and compactness. Good, thickness controllable effect
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[0021] The invention provides a method for increasing the hardness and wear resistance of ultra-thin glass, comprising the following steps:
[0022] S1. Take a glass substrate with a thickness of 1.1 mm or less, clean the glass substrate, remove stains on the surface of the glass substrate and dry it;
[0023] S2. Put the cleaned glass substrate into the magnetron sputtering coating equipment, when the vacuum degree of the magnetron sputtering vacuum chamber is 2.5*10 -3 At Pa, bake the magnetron sputtering vacuum cavity, the baking temperature is 60-65°C, the baking time is 20-30min, and the impurity molecules in the magnetron sputtering vacuum cavity are discharged;
[0024] S3. After the baking is finished, use zirconium as the target material and use the radio frequency power supply to carry out the pre-sputtering step first. The purpose of the pre-sputtering is to make the target material glow and remove impurities on the target material surface. The power of the radio fr...
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