Planar array type flexible electromagnetic sensor, preparation method and application method thereof

Abstract

The invention discloses a planar array type flexible electromagnetic sensor, a preparation method and an application method thereof. The sensor comprises a flexible substrate, wherein both surfaces ofthe flexible substrate are respectively provided with a periodic excitation coil, the main body structures between the periodic excitation coils on both surfaces overlap each other, have the consistent magnetic field directions, and are conducted through passing holes, one surface of the flexible substrate is provided with a plurality of differential detection coils arranged at intervals, and theplurality of the differential detection coils are arranged in an array between the periodic excitation coils. The preparation method comprises: sequentially preparing a flexible substrate, an electric-conduction copper layer structure, passing holes and a flexible insulating covering film. The application method comprises: determining a region having deep defect according to the peak-peak value of an output detection signal. According to the present invention, the planar array type flexible electromagnetic sensor has advantages of simple structure, convenient production, high sensitivity, high signal-to-noise ratio of the output signal and high detection efficiency, and can effectively detect the deep micro defect of metal materials, especially ferromagnetic material parts.

Description

technical field [0001] The invention relates to the field of electromagnetic sensors used for non-destructive testing, in particular to a planar array type flexible electromagnetic sensor, a preparation method and an application method. Background technique [0002] With the development of science and technology, the scope of application of non-destructive testing technology continues to expand. It is not only the basis of modern industrial technology, but also a key technology in aerospace, national defense and military fields. It is used in machinery, construction, metallurgy, electric power, petroleum, shipbuilding, automobile , aerospace, nuclear energy, railway and other industries are widely used. Among them, the eddy current non-destructive testing technology is a non-destructive testing method based on the principle of electromagnetic induction. It has the advantages of fast sensor response, high sensitivity, non-contact, and no coupling medium. It is an effective me...

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Problems solved by technology

[0003] However, traditional electromagnetic sensors generally have the following problems: ①The magnetic permeability of ferromagnetic materials is very large, and it can only detect defects with a depth of tens of microns due to the eddy current skin effect; ②There is a contradiction between detection efficiency and detection resolution, which is difficult to detect. Realize rapid detection; ③The signal-to-noise ratio is low, and the detected abnormal signal is submerged by the noise and the base signal; ④The adaptability to the detection object is poor, and the false detection rate of the complex structure is high.

[0005] Although the various planar electromagnetic sensors currently available can effectively improve the common shortcomings of traditional electromagnetic sensors, the output signal is weak and the signal-to-noise ratio is low, especially it is difficult to detect deep defects in ferromagnetic material components.

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