Intelligent fool-proof system and method for chemical replacement
A chemical and fool-proof technology, applied in the manufacture of instruments, electrical components, semiconductors/solid-state devices, etc., can solve problems such as the inability to accurately determine the appropriate replacement operation in advance
Active Publication Date: 2018-10-23
玄创半导体设备(上海)有限公司
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Problems solved by technology
[0003] The intelligent fool-proof system and method for chemical replacement in the present invention discloses a new scheme, which uses an intelligent information identification device to check the correctness of the item information before replacing the chemical, and solves the problem that the existing scheme cannot accurately judge the appropriateness of the replacement operation in advance
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[0019] Below in conjunction with accompanying drawing, the present invention will be further described.
[0020] Such as figure 1 As shown, the schematic diagram of the chemical replacement intelligent fool-proof system of the present invention. Chemical replacement intelligent fool-proof system includes equipment chemical replacement control system, chemical replacement smart cart, equipment chemical replacement control system includes chemical replacement fool-proof server, equipment communication terminal, equipment communication terminal and chemical replacement fool-proof server Communication connection, chemical replacement fool-proof server communicates with the chemical replacement smart cart through the equipment communication terminal, and the operator uses the chemical replacement smart cart to complete the extraction, transportation and replacement of chemicals. Chemical replacement fool-proof server includes equipment chemical container monitoring module, server ...
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The invention relates to an intelligent fool-proof system for chemical replacement, which comprises an equipment chemical replacement control system and a chemical replacement intelligent cart, wherein the equipment chemical replacement control system includes a chemical replacement fool-proof server and an equipment communication terminal; the chemical replacement fool-proof server includes an equipment chemical container monitoring module, a server chemical information matching module and an intelligent cart butting module; the chemical replacement intelligent cart includes a cart combination cabinet and a cart chemical replacement control system; the cart combination cabinet includes a plurality of chemical storage sub-cabinets; and the cart chemical replacement control system includesa chemical storage sub-cabinet monitoring module, a chemical recognition module, a cart chemical information matching module, an equipment communication terminal butting module and a human-computer interaction touch screen. The fool-proof method comprises the steps of chemical taking, chemical replacement, recycling and the like. The intelligent fool-proof system adopts an intelligent informationrecognition device to check the correctness of item information before chemical replacement, and has the characteristic of intelligent fool prevention in chemical replacement.
Description
technical field [0001] The invention relates to a system and method for replenishing and replacing chemicals, in particular to an intelligent fool-proof system and method for replacing chemical raw materials in the photolithography process of semiconductor production, and belongs to the field of semiconductor production equipment. Background technique [0002] The photolithography process is the core of integrated circuit manufacturing. In the photolithography process, there is an important gluing process. In this gluing process, the chemical formulation is usually packed in a special bottle, and the photoresist and other chemical formulations are stored in the In the special cabinet, when it needs to be used, it is connected to the special pipeline of the machine for extraction from the machine. When the chemical substance in the bottle is exhausted, the machine will alarm and prompt to replace a new bottle of chemical preparation. Such chemicals need to be replaced freq...
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IPC IPC(8): H01L21/67G07C9/00
CPCG07C9/00174G07C9/00896H01L21/67276
Inventor 赵德闻
Owner 玄创半导体设备(上海)有限公司