Shadow mask for oled evaporation and manufacturing method thereof, oled panel manufacturing method
A manufacturing method and shadow mask technology, which are applied in the field of OLED evaporation, can solve the problems of increased sub-pixel limit size, low aperture ratio, and inability to meet the requirements of small-sized and high-resolution OLED panels, so as to reduce shadow effects, The effect of increasing the aperture ratio
Active Publication Date: 2022-02-01
SEEYA OPTRONICS LTD
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Problems solved by technology
[0006] However, the existing OLED panel formed by evaporation has the problem that the limit size of the sub-pixel (light-emitting unit) is still increased, the aperture ratio is still low, and the problem that it cannot meet the requirements of a small-sized high-resolution OLED panel
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[0060] As mentioned in the background art, existing OLED panels formed by vapor deposition have the problems that the limit size of sub-pixels (light-emitting units) is still enlarged, and the aperture ratio is still low, which cannot meet the requirements of small-sized and high-resolution OLED panels.
[0061] A study of the existing evaporation process found that the size and shape of the openings in the existing metal shadow mask limit the size and aperture ratio of the sub-pixels (light-emitting units) formed by evaporation, that is, in the existing metal shadow mask The size of the opening is still large, so that the sub-pixels (light-emitting units) formed by evaporation using the metal shadow mask are still large, and the shape of the existing metal shadow mask is difficult to guarantee, thus affecting the pixel (light-emitting unit) formed by evaporation. The shape of the unit) affects the aperture ratio.
[0062] Further studies have found that the specific formation...
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Abstract
A shadow mask for OLED vapor deposition, a method for fabricating the same, and a method for fabricating an OLED panel, wherein the method for fabricating the shadow mask includes: providing a semiconductor substrate, the semiconductor substrate comprising a front surface and an opposite back surface; forming a cover covering the semiconductor substrate The grid film layer on the front side of the semiconductor substrate; etching the grid film layer to form a plurality of openings arranged in an array in the grid film layer, and the openings expose the front surface of the semiconductor substrate; along the backside of the semiconductor substrate The semiconductor substrate is etched, and a plurality of openings in the grid film layer and grooves of the grid film layer between adjacent openings are formed in the semiconductor substrate. The size of the openings in the grid film layer in the shadow mask formed by the invention can be smaller and the shape is better, and when it is used for vapor deposition, a light-emitting unit with smaller size and better shape can be formed, and the shadow can be reduced The influence of the effect increases the aperture ratio.
Description
technical field [0001] The invention relates to the field of OLED evaporation, in particular to a high-precision shadow mask for OLED evaporation, a manufacturing method thereof, and a manufacturing method of an OLED panel. Background technique [0002] Organic light-emitting diode (Organic Light-Emitting Diode, OLED) display panel also has self-illumination (no backlight required), high contrast, thin thickness, wide viewing angle, fast response, can be used for flexible panels, and has a wide temperature range Guanghe's structure and manufacturing process are relatively simple, and it is more and more favored by the industry. [0003] The original color scheme of the OLED display panel is to make a display unit that displays white light, and then use the corresponding color filter together. This technical solution This technical solution requires the introduction of color filters. Due to the blocking of color filters, about 80% of the light output from the display sub-pix...
Claims
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IPC IPC(8): H01L51/00H01L51/56H01L27/32H10K99/00
CPCH10K59/00H10K71/166H10K71/00
Inventor 孔杰居宇涵
Owner SEEYA OPTRONICS LTD