'Funnel'-shaped three-dimensional cell aggregation and culture chip and preparation method thereof
A three-dimensional cell and funnel technology, used in tissue cell/virus culture devices, biochemical equipment and methods, and methods for supporting/immobilizing microorganisms, etc.
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Embodiment 1
[0027] A method for preparing a "funnel"-like three-dimensional cell aggregation culture chip, characterized in that it is carried out in accordance with the following steps:
[0028] (1) Spin-coat SU-8 photoresist with a thickness of 400 microns on the surface of the glass substrate, and bake it at 95°C for 4 hours,
[0029] (2) Tilt angle exposure: fix a square array mask with a side length of 350 microns on the surface of the substrate containing photoresist, and place it on a platform that can adjust the tilt angle and rotate freely.
[0030] (3) During UV exposure, expose 4 times along the apex with an inclination angle of 60 degrees, and expose 4 times along the edge with an inclination angle of 40 degrees and rotate 45 degrees each time.
[0031] (4) Post-bake at 95°C for 10-30 minutes, add 400 micron thick SU-8 photoresist, and bake for 4 hours at 95°C for the second time.
[0032] (5) Vertical exposure: Use the same square mask with a side length of 350 microns to ex...
Embodiment 2
[0036] A method for preparing a "funnel"-like three-dimensional cell aggregation culture chip, characterized in that it is carried out in accordance with the following steps:
[0037] (1) Spin-coat SU-8 photoresist with a thickness of 300 microns on the surface of the glass substrate, and bake it at 95°C for 4 hours,
[0038] (2) Tilt angle exposure: fix a square array mask with a side length of 350 microns on the surface of the substrate containing photoresist, and place it on a platform that can adjust the tilt angle and rotate freely.
[0039] (3) During ultraviolet exposure, expose 4 times along the apex with a tilt angle of 50 degrees, and expose 4 times along the edge with a tilt angle of 35 degrees and rotate 45 degrees each time.
[0040] (4) Post-bake at 95°C for 10-30 minutes, add 500 micron thick SU-8 photoresist, and bake for 4 hours at 95°C for the second time.
[0041] (5) Vertical exposure: After the circular array mask of a square with a side length of 350 mic...
Embodiment 3
[0045] A method for preparing a "funnel"-like three-dimensional cell aggregation culture chip, characterized in that it is carried out in accordance with the following steps:
[0046] (1) Spin-coat SU-8 photoresist with a thickness of 300 microns on the surface of glass or silicon substrate, and bake it at 95°C for 4 hours,
[0047] (2) Tilt angle exposure: Fix a square array mask with a side length of 400 microns on the surface of the substrate containing photoresist, and place it on a platform that can adjust the tilt angle and rotate freely.
[0048] (3) During ultraviolet exposure, expose 4 times along the apex with a tilt angle of 50 degrees, and expose 4 times along the edge with a tilt angle of 35 degrees and rotate 45 degrees each time.
[0049] (4) Post-bake at 95°C for 10 minutes, add a 450-micron thick SU-8 photoresist, and bake for 8 hours at 95°C for the second time.
[0050](5) Vertical exposure: After the circular array mask of a square with a side length of 40...
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