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Flexible gas sensor chip structure

A gas sensor and chip structure technology, applied in instruments, scientific instruments, measurement devices, etc., can solve problems such as large environmental impact, poor stability, and sensor selectivity is not unique, and achieve the effect of expanding application scenarios

Inactive Publication Date: 2018-11-13
佛山市澄澜点寸科技有限公司
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  • Summary
  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Semiconductor gas sensors also have the following disadvantages: poor stability and greater environmental impact; especially, the selectivity of each sensor is not unique, and the output parameters cannot be determined
Therefore, it is not suitable to be used in places where accurate measurement is required

Method used

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  • Flexible gas sensor chip structure

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Embodiment Construction

[0014] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0015] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0016] see figure 1 , figure 1 It is a schematic diagram of the flexible gas sensor chip structure of the present invention. The present invention provides a flexible gas sensor chip structure, which includes a flexible substrate 1, a flexible gas sensing unit 2 and a flexible cover layer 3, and the flexible g...

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Abstract

The invention provides a flexible gas sensor chip structure. The flexible gas sensor chip structure comprises a flexible substrate, flexible gas sensing units and a flexible cover layer, wherein a plurality of flexible gas sensing units are arranged at intervals with each other; each flexible gas sensing unit comprises a flexible lower electrode and a flexible upper electrode; a gas sensitive layer is arranged between the flexible lower electrode and the flexible upper electrode; a metal wire is arranged in the flexible substrate as a connecting electrode; a metal wire is arranged below the flexible cover layer as a connecting electrode; the flexible lower electrode is connected with the metal wire in the flexible substrate; the flexible upper electrode is connected with the metal wire below the flexible cover layer; and the flexible cover layer is provided with holes which are formed at spaced positions among the flexible gas sensing units and avoid the metal wire in the flexible cover layer. The flexible gas sensor chip structure solves the packaging problem under the flexible requirement of the current gas sensor, realizes a flexible gas sensor through the packaging structure, and expands the application scenario of gas sensors.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, in particular to a flexible gas sensor chip structure. Background technique [0002] A gas sensor is a converter that converts a certain gas volume fraction into a corresponding electrical signal. The probe head conditions the gas sample through the gas sensor, usually including filtering out impurities and interfering gases, drying or cooling the display part of the instrument. Gas sensors are divided into: semiconductor gas sensors, electrochemical gas sensors, catalytic combustion gas sensors, thermal conductivity gas sensors, infrared gas sensors, etc. Semiconductor gas sensors use some metal oxide semiconductor materials. It is manufactured on the principle that the rate changes with the change of the ambient gas composition. For example, the alcohol sensor is prepared by using the principle that the resistance of tin dioxide will decrease sharply when it encounters alcohol gas at high...

Claims

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Application Information

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IPC IPC(8): G01N27/12
CPCG01N27/127
Inventor 徐雪华
Owner 佛山市澄澜点寸科技有限公司
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