A super-resolution three-dimensional shape measurement method based on optical tweezers dielectric microspheres
A technology of three-dimensional shape and measurement method, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of not being able to obtain the best imaging quality, image deformation, narrow measurement field of view, etc., and achieve high-precision super-resolution three-dimensional The effect of shape measurement, expanding imaging field of view, and improving detection efficiency
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[0031] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described below in conjunction with the accompanying drawings.
[0032] Such as figure 1 and figure 2 As shown, this super-resolution three-dimensional reconstruction measurement method based on optical tweezers dielectric microspheres can flexibly control the position of the dielectric microspheres, and at the same time, high-precision super-resolution three-dimensional measurement can be realized through optical field encoding.
[0033] Step S1: In the control optical path, load the pre-calculated desired phase distribution onto the phase-only spatial light modulator, and the collimated and expanded laser beam is modulated and reflected by the pure-phase spatial light modulator, and then passes through the objective lens after beam shrinkage Focusing forms an arrayed optical potential well, so that multiple medium microspheres can...
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