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Patterned preparation method of nano material field emission cathode

A field emission and patterning technology, used in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc., can solve the problems of poor vacuum environment, vacuum discharge or breakdown, affecting device stability, etc. Improve stability, reduce heat generation, and reduce the effect of interception

Inactive Publication Date: 2018-12-04
SOUTHEAST UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

The heating process of the grid is accompanied by the degassing of the components, and the degassing leads to the deterioration of the vacuum environment between the device electrodes. On the one hand, it may cause vacuum discharge or breakdown. On the other hand, the released gas is bombarded by electrons, and the gas is ionized Ions are formed, and the ions bombard the cathode under the drive of the electric field, which affects the life of the cathode
The interception of the gate has greatly affected the stability of the device, and it is urgent to use relevant technical means to solve the existing problems

Method used

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  • Patterned preparation method of nano material field emission cathode
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  • Patterned preparation method of nano material field emission cathode

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Embodiment 1

[0017] The present invention is specifically described below through the embodiment, only for further explanation of the present invention, can not be interpreted as the limitation of protection scope of the present invention, the technical engineer of this field can make some unessential to the present invention according to the content of above-mentioned invention improvements and adjustments.

[0018] Such as figure 1 As shown, in this embodiment, the carbon nanotube field emission cold cathode based on the screen printing process is taken as an example, but it is not limited to the field emission cold cathode prepared in this way, and can also be obtained by vapor deposition, physical deposition, electrophoresis, etc. Cold cathode materials prepared by other methods. The material of the field emission cathode can also be films in the form of carbon nanotubes, graphene, zinc oxide, and nano-gap. In this embodiment, the specific implementation process is to prepare a carbo...

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Abstract

The invention discloses a patterned preparation method of a nano field emission cold cathode, belongs to the field of material preparation, and particularly relates to the preparation of a nano material clod cathode such as carbon nanotubes, graphene and zinc oxide applied to a field emission electron gun of vacuum electronic devices. In allusion to drawbacks existing in the background technology,the invention designs a patterned preparation method of a nano material field emission cathode by combining a laser processing technology. The patterned field emission cathode can greatly improve theperformance of an electron gun based on the nano material clod cathode and has important practical application significance for improving the stability of cold cathode devices.

Description

technical field [0001] The invention belongs to the field of film material preparation, in particular to a cathode emitter used for a field emission cold cathode electron gun. Background technique [0002] As the core components of radar systems, communication systems, electronic countermeasure systems, imaging systems, high-energy particle accelerators, electron-positron colliders, controlled thermonuclear fusion and other systems and large scientific devices, vacuum electronic devices have promoted the update of military equipment in various countries around the world. Replacement to improve its combat performance, as well as the rapid construction of large scientific equipment. Traditional vacuum electronic devices mainly use hot cathodes as the electron emission materials of electron guns. The cathodes are heated to thousands of degrees to emit electrons. Due to the long heating process, on the one hand, the response speed of the device is limited, and on the other hand,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J9/02
CPCH01J9/025H01J9/027
Inventor 张晓兵张建王琦龙
Owner SOUTHEAST UNIV
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