Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Ceramic-based high-temperature-resistant fluid wall shear stress micro-sensor chip and manufacturing process thereof

A micro-sensor and ceramic-based technology, applied in the field of sensors, can solve problems such as insufficient dynamic performance and sensitivity, difficulty in enduring high-temperature environments, and difficulty in meeting test requirements, so as to improve measurement accuracy, eliminate disturbances, and solve compatibility problems.

Active Publication Date: 2018-12-11
NORTHWESTERN POLYTECHNICAL UNIV
View PDF6 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The main problem of this method is that the size of the balance is large, resulting in insufficient dynamic performance and sensitivity; at the same time, the temperature resistance of the pressure-sensitive strain gauge does not exceed 200°C, which is difficult to meet the actual test requirements
The shear stress microsensor based on microelectromechanical system (MEMS) technology has good sensitivity and response frequency, which can effectively capture the high-frequency fluctuation information of the flow field, but it is also difficult to withstand the high temperature environment exceeding 1000 °C

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Ceramic-based high-temperature-resistant fluid wall shear stress micro-sensor chip and manufacturing process thereof
  • Ceramic-based high-temperature-resistant fluid wall shear stress micro-sensor chip and manufacturing process thereof
  • Ceramic-based high-temperature-resistant fluid wall shear stress micro-sensor chip and manufacturing process thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0030] One of the main features of the ceramic-based high-temperature-resistant fluid wall shear stress microsensor chip in this embodiment is that the sensitive resistor is prepared by polymer-converted ceramic material, which has extremely stable physical and chemical properties, strong oxidation resistance, and can It can withstand high temperature environments exceeding 1000℃, and is currently the highest temperature-resistant micro-sensor for fluid wall shear stress. The second main feature of the ceramic-based high-temperature fluid-resistant wall shear stress microsensor chip is that the ceramic-based varistor of the microsensor is arranged on the elastic diaphragm, reducing the three-dimensional body processing process to a two-dimensional surface processing process, Ensure that the polymer-converted ceramic material molding process is compatible with the MEMS micro-machining process. The third main feature of the ceramic-based high-temperature-resistant fluid wall shea...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a ceramic-based high-temperature-resistant fluid wall shear stress micro-sensor chip, comprising: a sensitive unit (1), a support beam (2), a ceramic-based voltage dependent resistor (3), an elastic diaphragm (4), a gap (5), a substrate (6) and a cavity (7). According to the ceramic-based high-temperature resistant wall shear stress microsensor chip and a manufacturing process thereof, the sensitive resistor of a micro-sensor is prepared by using a polymer-derived ceramic-based high-temperature-resistant material, so that the micro-sensor has a capability of measuringa high-temperature flow field over 1000 degree centigrade. In addition, the micro-sensor manufacture is based on MEMS micro-machining technology such that the micro-sensor has a spatial resolution ofmicron order and a time resolution of sub-millimeter order, is suitable for the real-time refinement measurement of a high-frequency pulsating flow field, and satisfies the test requirements for high-temperature flow fields during the development of advanced aircrafts and high-performance engines.

Description

Technical field [0001] The invention relates to a ceramic-based high-temperature-resistant fluid wall shear stress microsensor chip and a manufacturing process thereof, and belongs to the technical field of sensors. Background technique [0002] The fluid wall shear stress is one of the important parameters that must be paid attention to in the development of a new generation of advanced aircraft and high-performance engines. Accurate measurement of shear stress is the prerequisite for mastering friction resistance, which is of great significance for the aerodynamic structure design and friction characteristics analysis of aircraft and engines; at the same time, shear stress is a direct way to judge the transition, separation, and reattachment phenomena in the fluid boundary layer. According to the criterion, delaying fluid transition helps to improve the operating efficiency of the new generation aircraft, and restraining the flow separation on the surface of the aircraft helps ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01L1/18
CPCG01L1/18
Inventor 马炳和丁光辉邓进军罗剑苑伟政刘康
Owner NORTHWESTERN POLYTECHNICAL UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com