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A method for improving the capacity of double-sided PERC battery plate type PECVD coating film

A battery panel, double-sided technology, applied in the direction of circuits, photovoltaic power generation, electrical components, etc., can solve the problems of not being able to improve the production capacity of the battery sheet, achieve the effect of improving the anti-reflection effect, improving the conversion efficiency, and widely used

Inactive Publication Date: 2018-12-18
TONGWEI SOLAR ENERGY CHENGDU CO LID
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the above-mentioned technical deficiencies, the present invention provides a method for improving the production capacity of double-sided PERC battery plate PECVD coating, which solves the problem that the existing PECVD coating process cannot improve the production capacity without reducing the electrical performance of the battery sheet

Method used

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  • A method for improving the capacity of double-sided PERC battery plate type PECVD coating film
  • A method for improving the capacity of double-sided PERC battery plate type PECVD coating film

Examples

Experimental program
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Embodiment 1

[0031] Embodiment 1: as figure 1 with figure 2As shown, a method is provided to improve the production capacity of double-sided PERC battery plate PECVD coating. The PM1 process chamber laughing gas flowmeter MFC1 is set to 550-650sccm, the trimethyl aluminum flowmeter is set to 450-550sccm, and the corresponding plasma source power is 2100 ~2300W, pulse on time 3~5ms, pulse off time 16~18ms; laughing gas flow meter MFC2 is set to 700~800sccm, the difference between MFC2 and MFC1 laughing gas flow is 150~200sccm, and the corresponding plasma source power is 2400~2600W, The pulse opening time is 5-7ms, and the pulse closing time is 16-18ms; the temperature of the process chamber is 340-370°C, and the pressure of the process chamber is 5×10-2mbar; the belt speed of the PM1 process chamber is set at 200-210cm / min. The ammonia flowmeters MFC1 to MFC5 in the PM2 process chamber are set to 800-900sccm, the silane flowmeters MFC1 to MFC5 are set to 300-400sccm, the corresponding pl...

Embodiment 2

[0033] Embodiment 2: as figure 1 with figure 2 As shown, this implementation is further optimized on the basis of Embodiment 1. This embodiment focuses on the improvements compared with Embodiment 1, and the similarities will not be repeated. The PM1 process chamber laughing gas flowmeter MFC1 is set to 550 ~650sccm, the trimethylaluminum flowmeter is set to 450~550sccm, the corresponding plasma source power is 2300~2500W, the pulse on time is 4~6ms, and the pulse off time is 16~18ms; the laughing gas flowmeter MFC2 is set to 700~800sccm, MFC2 The difference between the nitrous oxide flow rate and MFC1 is 150-200sccm, the corresponding plasma source power is 2400-2600W, the pulse opening time is 5-7ms, and the pulse closing time is 16-18ms; the process chamber temperature is 340-370°C, and the process chamber pressure is 5×10 -2mbar; PM1 process chamber belt speed is set to 205 ~ 210cm / min. The ammonia flowmeters MFC1 and MFC2 in the PM2 process chamber are set to 550-650sc...

Embodiment 3

[0035] Embodiment 3: as figure 1 with figure 2 As shown, this implementation is further optimized on the basis of Embodiment 1. This embodiment focuses on the improvements compared with Embodiment 1, and the similarities will not be repeated. The original process parameters refer to the equipment after entering the factory. , the original process parameters set by the supplier manufacturer, the specific process parameters are: PM1 process chamber laughing gas flowmeter MFC1 and MFC2 are set to 600~700sccm, trimethyl aluminum flowmeter is set to 450~550sccm, the corresponding plasma source The power is 2100-2300W, the pulse on time is 3-5ms, and the pulse off time is 16-18ms; the process chamber pressure is 5×10-2mbar, the process chamber temperature is 340-370°C, and the PM1 process chamber belt speed is set to 190-200cm / min. The ammonia gas flowmeters MFC1 to MFC5 in the PM2 process chamber are set to 600-800sccm, the corresponding plasma source power is 3200-3500W, the pul...

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Abstract

The invention discloses a method for improving the capacity of a double-sided PERC battery plate type PECVD coating film, relates to the field of crystal silicon solar cell manufacture, and solves theproblem that an existing PECVD coating process cannot improve the capacity without reducing the electrical performance of the battery sheet. According to the invention also discloses a method for improving the capacity of a double-sided PERC battery plate type PECVD coating film, the anti-reflection effect of the double-sided PERC battery is improved through a backside progressive coating technology, and finally the double-side ratio of a PERC battery is improved, and starting with improving the microwave power limit, special gas flow limit and equipment parameter limit, the purpose of improving the capacity is achieved.

Description

technical field [0001] The invention belongs to the field of crystalline silicon solar cell manufacturing, and more specifically relates to a method for improving the production capacity of double-sided PERC cell plate type PECVD coating. Background technique [0002] At present, high-efficiency crystalline silicon cells are the mainstream development trend of solar cells, and PERC (passivated emitter rear contact cells) with superior cost performance will occupy a large number of markets, and has become a standard advanced solar cell technology. PERC cells require backside passivation and backside coating processes. It can be seen that the coating process is the most important part of the PERC cell production process, and the quality of the coating layer directly affects the electrical performance of the cells. At present, more advanced equipment that can perform back passivation includes ALD (atomic layer deposition) equipment for microconductors and MAiA equipment for Mey...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0216H01L31/18C23C16/513
CPCC23C16/513H01L31/02167H01L31/1868Y02E10/50Y02P70/50
Inventor 苏荣王岚张元秋谢耀辉王涛
Owner TONGWEI SOLAR ENERGY CHENGDU CO LID
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