Ultra-small high-sensitivity two-dimensional anemometer and fabrication method thereof
A high-sensitivity, ultra-small technology, applied in the direction of measuring fluid velocity using thermal variables, can solve problems such as unfavorable process and packaging, high sensor power consumption, easy damage to the structure, etc., to achieve high fit and high temperature drift suppression ability. , the effect of high reliability
Active Publication Date: 2019-01-01
SOUTHEAST UNIV
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Problems solved by technology
However, due to the high thermal conductivity of the silicon substrate, this type of sensor consumes a lot of power and has low sensitivity
Using the method of back etching or front etching to form a thermal insulation film can improve the sensitivity, but the structure is easily damaged, which is not conducive to the subsequent process and packaging
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[0030] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0031] The present invention designs an ultra-small high-sensitivity two-dimensional anemometer, such as figure 1 , figure 2 and image 3 As shown, in practical applications, it specifically includes a substrate 1, an insulating medium layer 2, a square prism 3, a heating element 4, four thermocouple stacks 51 for temperature measurement, a circuit board 6, a cover plate 10 and each binding lead wire 8 .
[0032] Wherein, in actual application, the insulating dielectric layer 2 is made of silicon dioxide, and the shape and size of the insulating dielectric layer 2 are equal to the shape and size of the substrate 1, and the insulating dielectric layer 2 covers and is arranged on the upper surface of the substrate 1. In practice, In application, the square prism 3 is made of insulating material with low thermal conduct...
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The invention relates to an ultra-small high-sensitivity two-dimensional anemometer, which comprises a substrate (1), an insulating dielectric layer (2), a positive quadrangular platform (3), a heating element (4) and four temperature measurement thermopiles (5). In combination of the technical scheme of the invention, the ultra-small high-sensitivity two-dimensional anemometer is built, and a corresponding ultra-small high-sensitivity two-dimensional anemometer fabrication method is designed. The anemometer and the fabrication method thereof have the following advantages that: 1) due to the introduction of the platform structure, a height difference is generated between a measuring plane and a plane with a welding lead, and packaging of the sensor is facilitated; 2) the thermocouple of the sensor is approximately placed vertically, a cold end is sealed through a packaging adhesive and is kept to have the same temperature as the substrate and the shell, consistency of the temperature at the cold end is effectively ensured, and the temperature drift suppression ability of the sensor is high; 3) due to the introduction of the platform structure, the transverse size of the thermocouple is greatly reduced and the size of the device is smaller; and 4) the fit degree between the sensitive surface of the sensor and the shell is high, being directly exposed in the air with no packagingadhesive is realized, and the sensor reliability is high.
Description
technical field [0001] The invention relates to an ultra-small high-sensitivity two-dimensional anemometer and a manufacturing method thereof, belonging to the technical field of wind speed detection. Background technique [0002] Wind speed and wind direction are very important parameters to reflect meteorological conditions, and have an important impact on environmental monitoring, air conditioning, and industrial and agricultural production. Therefore, it is of great practical significance to quickly and accurately measure wind speed and wind direction. As we all know, although wind cups and wind vanes that are machined can also measure wind speed and wind direction, these mechanical devices are easy to wear due to moving parts, and have the disadvantages of large volume, high price, and frequent maintenance. The positions of the transmitting and detecting receiving heads of a typical ultrasonic wind speed sensor are fixed, so the relative structure is relatively large. ...
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IPC IPC(8): G01P5/10
CPCG01P5/10
Inventor 秦明张瑶霖易真翔黄庆安
Owner SOUTHEAST UNIV