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A Series Piezoelectric Actuated Nanopositioning Platform

A nano-positioning and piezoelectric-driven technology, which is applied in the direction of machines/brackets, instruments, and instrument parts, can solve problems affecting the positioning accuracy of positioning platforms, coupling of parallel nano-positioning platforms, and poor platform stability, so as to improve precision High degree, avoid displacement coupling phenomenon, compact structure effect

Active Publication Date: 2020-11-10
SANYING MOTIONCONTORL TIANJIN INSTR CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the parallel nano-positioning platform has a serious coupling phenomenon, and the stiffness is small, the stability of the platform is poor, and the positioning accuracy of the positioning platform is affected.

Method used

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  • A Series Piezoelectric Actuated Nanopositioning Platform
  • A Series Piezoelectric Actuated Nanopositioning Platform
  • A Series Piezoelectric Actuated Nanopositioning Platform

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] like Figure 1-Figure 3 As shown, the series piezoelectric driven nanopositioning platform of the present invention includes a base, a platform body 1 installed in the base, an XY direction motion platform and a piezoelectric ceramic driver installed on the platform body 1, and the XY direction motion platforms are respectively The X-direction flexible hinge 8 and the Y-direction flexible hinge 9 are assembled in the base. The X-direction flexible hinge 8 and the Y-direction flexible hinge 9 are connected to the platform body 1 through the X-direction spring assembly 3 and the Y-direction spring assembly 5 respectively. The flexible hinge 8 and the Y-direction flexible hinge 9 are flexible hinges with a three-layer cutting structure; the XY-direction flexible hinges respectively form a series structure to form a closed loop. An X-direction sensor 6 for detecting the X-direction displacement of the movement platform and a Y-direction sensor 7 for detecting the Y-directio...

Embodiment 2

[0040] On the basis of Embodiment 1, the X-direction sensor 6 and the Y-direction sensor 7 are capacitive sensors, which are connected to an external controller to realize the closed-loop control of the platform in the X or Y direction, with high positioning accuracy.

Embodiment 3

[0042] On the basis of Embodiment 1, an upper cover and a lower cover are installed on the upper and lower surfaces of the platform body 1, which can not only protect various components in the platform body, but also ensure the beautiful appearance of the positioning platform.

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Abstract

The invention discloses a series-connected piezoelectricity-actuated nano-positioning platform. The nano-positioning platform comprises a platform body, an XY-directional motion platform and piezoelectric ceramic actuators, wherein the platform body is mounted in a base; the XY-directional motion platform is mounted on the platform body as well as in the base respectively through an X-directionalflexure hinge and a Y-directional flexure hinge; the X-directional flexure hinge and the Y-directional flexure hinge are connected to the platform body respectively through an X-directional spring assembly and a Y-directional spring assembly; an X-directional sensor for measuring the X-directional displacement of the XY-directional motion platform and a Y-directional sensor for measuring the Y-directional displacement of the XY-directional motion platform are respectively mounted in the XY-directional motion platform; displacement data read by the X-directional sensor and displacement data read by the Y-directional sensor are used to cooperatively complete the detection and feedback of the two-degree-of-freedom motion of the nano-positioning platform; and the piezoelectric ceramic actuators are inlaid in the X-directional flexure hinge and the Y-directional flexure hinge respectively and used for actuating the two-dimensional motion of the XY-directional moving platform. The nano-positioning platform has the following beneficial effects: the coupled displacement of the series-connected flexure hinges is small, the yaw is small, the linearity is good and the positioning accuracy ishigh.

Description

technical field [0001] The invention belongs to the technical field of high-precision positioning equipment, and in particular relates to a series piezoelectric driven nanometer positioning platform. Background technique [0002] Nano-devices include nano-electronic devices and nano-optoelectronic devices, which can be widely used in electronics, optics, micro-mechanical devices, new computers, etc. It is the most dynamic research field in the field of new materials and new devices. , intelligence, high integration and other mainstream development directions. Due to the potential huge market and national defense value of nano-devices, the methods, approaches and processes of its design and manufacture have become the thermoelectric research and investment of many scientists, governments and large enterprises. [0003] The nano-positioning system with large stroke, high speed and high precision occupies an extremely important position in the field of modern cutting-edge indu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00F16M11/04
CPCF16M11/043
Inventor 贾静张莹
Owner SANYING MOTIONCONTORL TIANJIN INSTR CO LTD
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