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A kind of PVD film-forming method of graphene electromagnetic coil

An electromagnetic coil and film-forming method technology, applied in the field of PVD film-forming of graphene electromagnetic coils, can solve problems such as easy damage and unstable electromagnetic coil structure, and achieve low equipment requirements, good social promotion and application, and operability strong effect

Active Publication Date: 2020-06-02
JIMEI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the deficiencies of the prior art, the present invention provides a PVD film-forming method of a graphene electromagnetic coil, which solves the problem that the structure of the existing graphene electromagnetic coil is unstable and easily damaged

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] A PVD film-forming method of a graphene electromagnetic coil, comprising the following steps:

[0031] A: First clean the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace to ensure that the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace are free of dust. The cleaning of the graphene electromagnetic coil and the vacuum furnace is plastic cleaning One of solvent cleaning or ultrasonic cleaning, the outer surface of the graphene electromagnetic coil is dried naturally, and the inner surface of the vacuum furnace is dried at low temperature, and the drying temperature is 40°C;

[0032] B: Then put the cleaned graphene electromagnetic coil into the vacuum furnace, start the vacuum furnace, and vacuumize the vacuum furnace by 0.5x10 -3 Pa, control the temperature of the vacuum furnace at 50°C;

[0033] C: Start the turntable in the vacuum furnace. The turntable is divided into a sel...

Embodiment 2

[0039] A PVD film-forming method of a graphene electromagnetic coil, comprising the following steps:

[0040] A: First clean the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace to ensure that the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace are free of dust. The cleaning of the graphene electromagnetic coil and the vacuum furnace is plastic cleaning One of solvent cleaning or ultrasonic cleaning, the outer surface of the graphene electromagnetic coil is dried naturally, and the inner surface of the vacuum furnace is dried at low temperature, and the drying temperature is 50°C;

[0041] B: Then put the cleaned graphene electromagnetic coil into the vacuum furnace, and start the vacuum furnace, the vacuum furnace is vacuumed 1.0x10 -3 Pa, control the temperature of the vacuum furnace at 120°C;

[0042] C: Start the turntable in the vacuum furnace. The turntable is divided into a sel...

Embodiment 3

[0048] A PVD film-forming method of a graphene electromagnetic coil, comprising the following steps:

[0049] A: First clean the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace to ensure that the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace are free of dust. The cleaning of the graphene electromagnetic coil and the vacuum furnace is plastic cleaning One of solvent cleaning or ultrasonic cleaning, the outer surface of the graphene electromagnetic coil is dried naturally, and the inner surface of the vacuum furnace is dried at low temperature, and the drying temperature is 60°C;

[0050] B: Then put the cleaned graphene electromagnetic coil into the vacuum furnace, start the vacuum furnace, and vacuumize the vacuum furnace by 1.5x10 -3 Pa, control the temperature of the vacuum furnace at 200°C;

[0051] C: Start the turntable in the vacuum furnace. The turntable is divided into a se...

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Abstract

The invention discloses a PVD film forming method of a graphene electromagnetic coil. The method includes seven steps. The surface of the graphene electromagnetic coil is plated with a layer of DLC film through electron beams, then a high-compactness DLC film layer with higher adhesive force is formed on the DLC film layer on the electromagnetic coil through ion beams, and the stability and compactness of the graphene electromagnetic coil are greatly improved. The surface of the DLC film layer is plated with the outer film layer through arc targeting, and a target material for arc targeting isany one of or combination of Ar, Ti, Ag, Ni and Si, so that the outer film layer is a composition of Ar, Ti, Ag, Ni and Si, the graphene electromagnetic coil has certain antibacterial performance, and the hardness and stability of the graphene electromagnetic coil are further enhanced.

Description

technical field [0001] The invention relates to the technical field related to graphene, in particular to a PVD film forming method of a graphene electromagnetic coil. Background technique [0002] The electromagnetic coil is established by using the magnetic field around the wire, and it is wound into a helical shape to strengthen the magnetic field, that is, the smallest space is used to achieve the highest magnetic field strength. Significant progress has been made in the field of miniaturization of electronic components. However, solenoids are still too large in comparison. Now, researchers at Rice University have discovered that helical graphene nanocoils can generate powerful magnetic fields and can be used as nanoscale electromagnetic coils. As with macroscopic electromagnetic coil inductors, applying a voltage causes a current to flow, and as the current flows in a helical path, a magnetic field is generated. The research team observed that the 70-nm-wide nano-coi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/30C23C14/06C23C14/58C23C14/32
CPCC23C14/0605C23C14/30C23C14/325C23C14/5833
Inventor 魏莎莎林荣川翁建春
Owner JIMEI UNIV