A kind of PVD film-forming method of graphene electromagnetic coil
An electromagnetic coil and film-forming method technology, applied in the field of PVD film-forming of graphene electromagnetic coils, can solve problems such as easy damage and unstable electromagnetic coil structure, and achieve low equipment requirements, good social promotion and application, and operability strong effect
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Embodiment 1
[0030] A PVD film-forming method of a graphene electromagnetic coil, comprising the following steps:
[0031] A: First clean the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace to ensure that the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace are free of dust. The cleaning of the graphene electromagnetic coil and the vacuum furnace is plastic cleaning One of solvent cleaning or ultrasonic cleaning, the outer surface of the graphene electromagnetic coil is dried naturally, and the inner surface of the vacuum furnace is dried at low temperature, and the drying temperature is 40°C;
[0032] B: Then put the cleaned graphene electromagnetic coil into the vacuum furnace, start the vacuum furnace, and vacuumize the vacuum furnace by 0.5x10 -3 Pa, control the temperature of the vacuum furnace at 50°C;
[0033] C: Start the turntable in the vacuum furnace. The turntable is divided into a sel...
Embodiment 2
[0039] A PVD film-forming method of a graphene electromagnetic coil, comprising the following steps:
[0040] A: First clean the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace to ensure that the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace are free of dust. The cleaning of the graphene electromagnetic coil and the vacuum furnace is plastic cleaning One of solvent cleaning or ultrasonic cleaning, the outer surface of the graphene electromagnetic coil is dried naturally, and the inner surface of the vacuum furnace is dried at low temperature, and the drying temperature is 50°C;
[0041] B: Then put the cleaned graphene electromagnetic coil into the vacuum furnace, and start the vacuum furnace, the vacuum furnace is vacuumed 1.0x10 -3 Pa, control the temperature of the vacuum furnace at 120°C;
[0042] C: Start the turntable in the vacuum furnace. The turntable is divided into a sel...
Embodiment 3
[0048] A PVD film-forming method of a graphene electromagnetic coil, comprising the following steps:
[0049] A: First clean the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace to ensure that the outer surface of the graphene electromagnetic coil and the inner surface of the vacuum furnace are free of dust. The cleaning of the graphene electromagnetic coil and the vacuum furnace is plastic cleaning One of solvent cleaning or ultrasonic cleaning, the outer surface of the graphene electromagnetic coil is dried naturally, and the inner surface of the vacuum furnace is dried at low temperature, and the drying temperature is 60°C;
[0050] B: Then put the cleaned graphene electromagnetic coil into the vacuum furnace, start the vacuum furnace, and vacuumize the vacuum furnace by 1.5x10 -3 Pa, control the temperature of the vacuum furnace at 200°C;
[0051] C: Start the turntable in the vacuum furnace. The turntable is divided into a se...
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Abstract
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