Device and method for testing high-temperature electrical characteristics of semiconductor devices

Abstract

The invention discloses a high-temperature electrical characteristic testing device and a method for a semiconductor device. The device comprises a pulse power supply, a constant temperature heating equipment, and an electrical characteristic testing equipment. The method comprises the following steps of during a first preset time, the pulse power supply supplies a current pulse to a device to betested, and the constant temperature heating equipment heats the device to be tested; after the first preset time, the connection between the pulse power source and the device to be tested is disconnected, the constant temperature heating equipment adjusts the temperature of the device to be tested, so that the junction temperature of the device to be tested reaches and maintains the target temperature; the electrical characteristic testing equipment performs a high-temperature electrical characteristic test on the device to be tested. By implementing the high-temperature electrical characteristic testing device and method for semiconductor device, the device to be tested is heated by the combination of its own loss and the constant temperature heating device, the heating rate is fast; theelectrical characteristic testing equipment is not in contact with the device during the temperature rise of the device to avoid being affected by high temperature; the pulse power supply and the electrical characteristic testing equipment are disconnected during the test so as to prevent the two devices from interacting with each other, the testing process is safer and can be quickly and extensively tested in large batches.

Description

technical field [0001] The invention relates to the technical field of testing high-temperature electrical characteristics of semiconductor devices, in particular to a device and method for testing high-temperature electrical characteristics of semiconductor devices. Background technique [0002] Semiconductor devices based on semiconductor materials will generate certain losses while realizing specific functions. These losses are usually expressed in the form of heat, which will increase the temperature of the device itself and the environment. The electrical characteristics of semiconductor devices often change due to changes in temperature. Therefore, semiconductor devices usually need to be tested for their electrical characteristics at high temperatures before they are manufactured or used, so as to screen out samples with unqualified parameters. In addition, the electrical characteristics test of semiconductor devices under high temperature conditions can also expose ...

AI Technical Summary

Problems solved by technology

[0004] Therefore, the present invention provides a method and device for testing the high-temperature electrical characteristics of semiconductor devices, which overcomes the defects in the prior art that the high-temperature electrical characteristics of semiconductor devices cannot be tested quickly and accurately.

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