Scanning probe microscope

Abstract

In the present invention, when trace image data is acquired while using a probe (16) to scan an area on a sample (10) in a forward direction and retrace image data is acquired while scanning the samearea in the reverse direction, a deviation information storage unit (32) stores deviation detected by a deviation detection unit (20). This deviation is an indication of the difference between the distance between the probe and the sample and a target value for the distance at a given point in time. An image data selection unit (31) compares the deviation during forward scanning and the deviationduring reverse scanning for each measurement point, selects the image data acquired during scanning that has the smallest deviation, and stores the same to a storage area (33c) of an image data storage unit (33) as selected image data. An image formation unit (30) creates a sample surface shape image on the basis of the selected image data and displays the same on a display unit (5). As a result,even if there is a steep recess or protrusion on a sample (10) and there is a tracking delay or disturbance in the feedback control for the distance between the probe and the sample, it is possible todisplay an accurate image close to the actual shape of the surface of the sample.

Description

technical field [0001] The present invention relates to a scanning probe microscope, and more specifically, to a processing technique for image data reflecting the surface shape of a sample obtained in a scanning probe microscope. Background technique [0002] Scanning Probe Microscope (hereinafter referred to as "SPM") brings the tip of a tiny probe (probe) close to the surface of the sample, and detects the mechanical or electromagnetic interaction between the probe and the sample. The probe is used to scan the surface of the sample to observe the shape of the sample surface, the distribution of electrical characteristics, and the like. In an atomic force microscope (Atomic Force Microscope, hereinafter abbreviated as "AFM"), which is a typical SPM, atomic force is measured as an interaction between a probe and a sample surface (see Non-Patent Document 1, etc.). [0003] AFM generally has a scanner that moves the sample in the three-axis directions of X, Y, and Z that are...

AI Technical Summary

Problems solved by technology

Therefore, sometimes the inaccurate image data in the tracking image data and the retrace image data may be selected, and an accurate sample surface image may not be obtained

[0009] In addition, when the value of the tracking image data in a certain part exceeds a prescribed threshold, the retrace image data obtained for that part may not necessarily represent the surface shape of the sample more accurately.

Therefore, even in the case of using the above-mentioned other methods in Patent Document 1, inaccurate image data among the tracking image data and the retrace image data may sometimes be selected, and an accurate sample surface image may not always be obtained.

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