Capacitive pressure sensor, manufacturing method thereof, and pressure measuring device

A pressure sensor, capacitive technology, applied in the field of sensors, can solve the problems of poor linearity, easy electrical in the vacuum chamber, poor vacuum tightness, etc., achieve good linear output, simplify the manufacturing process, and avoid the effect of electrode extraction

Active Publication Date: 2021-06-08
INST OF ELECTRONICS CHINESE ACAD OF SCI
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The main purpose of the present invention is to provide a capacitive pressure sensor, its preparation method, and pressure measuring device, aiming at solving the problem of poor linearity and poor vacuum sealing of the capacitive pressure sensor in the prior art, and the electrodes in the vacuum chamber are easily drawn out. technical problem

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Capacitive pressure sensor, manufacturing method thereof, and pressure measuring device
  • Capacitive pressure sensor, manufacturing method thereof, and pressure measuring device
  • Capacitive pressure sensor, manufacturing method thereof, and pressure measuring device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] In order to make the purpose, features and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described The embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the protection scope of the present invention.

[0025] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "directly above", "directly below", "both ends", "both sides" and the like are based on the orientation or positional relationship shown in the drawings , are only for the convenience of describing the ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a capacitive pressure sensor, which is suitable for the sensor field. It includes a substrate and a cover plate. The substrate includes a top layer, a bottom layer and an insulating layer. So that the groove forms a vacuum cavity, and the bottom of the groove forms a pressure-sensitive film, and the top layer is provided with a movable interdigital capacitor and a fixed interdigital capacitor, which are arranged staggered and equidistant from each other, and the movable interdigital capacitor passes through. The insulating layer directly under it is attached to the pressure-sensitive film, and the insulating layer directly under the fixed interdigital capacitor is suspended between the bottom layer and the fixed interdigital capacitor. The embodiment of the present invention also discloses a preparation method and a pressure measurement device of a capacitive pressure sensor. When the pressure-sensitive film is deformed by force, the facing area between the movable interdigital capacitor and the fixed interdigital capacitor can be adjusted. It has good linear output, and at the same time, the vacuum tightness is good, which can avoid the extraction of electrodes in the vacuum cavity.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a capacitive pressure sensor, a preparation method thereof, and a pressure measuring device. Background technique [0002] With the development of the sensor industry, sensors based on Micro-Electro-Mechanical System (MEMS) technology have become one of the most important branches in the development of the sensor industry. MEMS is a semiconductor technology for mass production of microstructures, microsensors, microactuators, microsystems and their signal processing circuits. [0003] Pressure sensors based on MEMS technology are widely used in many fields such as industrial production, medical and health care, environmental monitoring, and scientific research. Among them, the capacitive pressure sensor is a main type of MEMS pressure sensor, and its fundamental principle is to convert pressure changes into capacitance changes. According to the capacitance formula, capacitive p...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/02B81C1/00G01L1/14
CPCB81B7/02B81B2201/0264B81C1/00015G01L1/142
Inventor 赵湛刘振宇杜利东方震
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap