Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

30results about How to "Good vacuum tightness" patented technology

Domical microwave plasma chemical vapor deposition diamond film device

The invention relates to a domical microwave plasma chemical vapor deposition diamond film device which is suitable for quick preparation of a high-quality diamond film in the presence of high-power microwave input. A resonant cavity main body is composed of a domical reflecting body, a metal sheet reflecting body, a quartz ring window, a cylindrical reflecting body and a deposition platform, wherein the metal sheet reflecting body can block spreading of microwave to the top of the resonant cavity, so that more microwave can be accumulated above a substrate; the deposition platform is divided into a central deposition platform and a marginal deposition platform, and the independent vertical moving functions of the central deposition platform and the marginal deposition platform are beneficial to realize quick optimization of a plasma state; and the quartz ring window is hidden in a slit formed by the wall of the resonant cavity, thus avoiding etching of plasma and being beneficial to improve the vacuum performance of the resonant cavity. Besides, the favorable design of a water cooling system ensures the high-power operating safety of the equipment. So many advantages are combined, so that the domical microwave plasma chemical vapor deposition device has a capability of depositing a high-quality diamond film at high speed under a high power level.
Owner:HEBEI PLASMA DIAMOND TECH

Capacitive pressure sensor, preparation method thereof, and pressure measure device

Disclosed is a capacitive pressure sensor, applicable to the field of sensors. The capacitive pressure sensor includes a substrate and a cover plate. The substrate includes a top layer, a bottom layerand an insulation layer, the lower surface of the bottom layer is provided with a groove, a lid groove, so that the groove forms a vacuum cavity, and a varistor film is formed on the groove bottom ofthe groove, wherein the top layer is provided with a movable interdigital capacitor and a fixed interdigital capacitor which are staggered and arranged at an equal distance from each other, the movable interdigital capacitor is bonded to the varistor film through an insulating layer positioned directly below the movable interdigital capacitor, and the insulating layer directly below the fixed interdigital capacitor is suspended between the bottom layer and the fixed interdigital capacitor. The embodiment of the invention also discloses a preparation method of a capacitive pressure sensor anda pressure measuring device. When the varistor film is deformed, the area of the movable interdigital capacitance relative to the fixed interdigital capacitance can be changed, thereby changing the capacitance value, and exhibiting a good linear output. At the same time, the vacuum sealing property is good, and the lead-out of the electrode in the vacuum cavity can be avoided.
Owner:INST OF ELECTRONICS CHINESE ACAD OF SCI

Vacuum sealing joint for low-temperature tubular heating tube

InactiveCN105909791ASolve the technical requirements that cannot ensure the vacuum sealing of the furnaceSimple structureEngine sealsEngineeringHeating furnace
The invention relates to a vacuum sealing joint for a low-temperature tubular heating tube. The vacuum sealing joint comprises a tubular spiral heating tube, a vacuum joint, a sealing ring and compression nuts, wherein the vacuum joint is fixedly connected into an installation hole of a vacuum furnace wall; conducting ends of the tubular spiral heating tube are inserted in the vacuum joint; the vacuum joint is provided with inner conical holes, and in fit connection with outer conical tables on the tubular spiral heating tube through the inner conical holes; the sealing ring is arranged between the inner conical holes and the outer conical tables; and the tubular spiral heating tube is locked and fixed, and the sealing ring is compressed on the conducting ends of the tubular spiral heating tube through the compression nuts, so as to achieve a vacuum sealing effect. The joint enables a heating component of a vacuum furnace to be directly supplied with power of 220 V instead of being supplied with power by configuring voltage dropping equipment, thus configuration of a small vacuum furnace is simplified, and the equipment cost is reduced. Moreover, a reliable sealing structure is provided for producing the small vacuum heating furnace by virtue of the heating component for vacuum heating, and a technical support is provided for producing the small vacuum heating furnace by widely using the tubular heating tube.
Owner:SHANGHAI HENGTUO HYDRAULIC CONTROL TECH

Chemical vapor deposition equipment

The invention relates to chemical vapor deposition equipment which comprises a shell, a reaction system, and a heating element positioned between the shell and the reaction system, wherein the reaction system is arranged in the shell, and comprises a raw material supply device and a reaction room; the heating element is arranged on the inner wall of the shell on the outer sides of the raw material supply device and the reaction room. The chemical vapor deposition equipment is characterized in that the shell comprises a shell main body and a door; an inner cavity is formed by surrounding of the shell main body and the door, and is a cuboid; the door can be opened or close one surface of the inner cavity. The chemical vapor deposition equipment, provided by the invention, can prepare materials with huge size, and realizes the preparation of the materials with huge size under the premise of possibly decreasing the volume; the single-surface door opening design enables the daily mounting and disassembly of internal components to be directly operated simply on the ground level; the control and use of a reaction furnace can be realized by less manpower; the chemical vapor deposition equipment satisfies the industrial large-scale production of preparing the materials with huge size by the CVD (Chemical Vapor Deposition) technology, improves the productivity, and reduces the production cost.
Owner:SINOMA SYNTHETIC CRYSTALS (SHANDONG) CO LTD

Vacuum gate valve with neutron shielding function

The invention relates to a vacuum gate valve with a neutron shielding function. The vacuum gate valve comprises a driving mechanism, a valve shell and a valve plate, and is characterized in that the valve plate comprises an outer valve plate made of 0Cr18Ni9 stainless steel, a shielding plate made of lead boron polyethylene and an inner valve plate made of 0Cr18Ni9 stainless steel; an annular sealing groove is formed in the side, close to the valve shell, of the outer valve plate, and an ethylene propylene diene monomer vacuum sealing ring is embedded into the annular sealing groove and used for achieving vacuum sealing between the outer valve plate and the valve shell. According to the vacuum gate valve with the neutron shielding function, the problem that an existing conventional vacuumgate valve cannot shield neutron radiation is solved, the vacuum gate valve can be applied to the environment with neutron radiation, and the two functional requirements of vacuum sealing and neutronradiation shielding are met. The vacuum gate valve with the neutron shielding function has the advantages of being large in conductance, good in vacuum sealing performance, convenient to arrange a vacuum system, high in reliability and the like.
Owner:北京利方达真空技术有限责任公司

Capacitive pressure sensor, manufacturing method thereof, and pressure measuring device

The invention discloses a capacitive pressure sensor, which is suitable for the sensor field. It includes a substrate and a cover plate. The substrate includes a top layer, a bottom layer and an insulating layer. So that the groove forms a vacuum cavity, and the bottom of the groove forms a pressure-sensitive film, and the top layer is provided with a movable interdigital capacitor and a fixed interdigital capacitor, which are arranged staggered and equidistant from each other, and the movable interdigital capacitor passes through. The insulating layer directly under it is attached to the pressure-sensitive film, and the insulating layer directly under the fixed interdigital capacitor is suspended between the bottom layer and the fixed interdigital capacitor. The embodiment of the present invention also discloses a preparation method and a pressure measurement device of a capacitive pressure sensor. When the pressure-sensitive film is deformed by force, the facing area between the movable interdigital capacitor and the fixed interdigital capacitor can be adjusted. It has good linear output, and at the same time, the vacuum tightness is good, which can avoid the extraction of electrodes in the vacuum cavity.
Owner:INST OF ELECTRONICS CHINESE ACAD OF SCI

An ultra-broadband terahertz Brewster vacuum window and its preparation method

The invention discloses an ultra-wideband terahertz Brewster vacuum window and a production method thereof. The ultra-wideband terahertz Brewster vacuum window adopts a window plate supporting frame, wherein the window plate supporting frame comprises an elliptical bottom surface and a circular groove; through the elliptical bottom surface, an elliptical section of a cylindrical waveguide is welded, and through the circular groove, a circular window plate is welded, so that electromagnetic wave is propagated from the cylindrical waveguide to the circular window plate; during welding of the circular window plate, stress distribution is relatively uniform, and when the circular window plate is welded with the window plate supporting frame, the influence of stress can be reduced to avoid cracking; a rectangular through hole is formed in the window plate supporting frame, and the influence of the stress can be reduced when a passing condition of the wave is met, so that welding success rate is greatly increased; the structures are connected in a welding manner so as to meet a sealing vacuum requirement; the thickness of the circular window plate meets a requirement that reflected wave and the re-refracted wave are counteracted with each other, so that the transmission efficiency is improved; the ultra-wideband terahertz Brewster vacuum window can achieve ultra-wideband transmission of the electromagnetic wave within a terahertz wave band, has good vacuum sealing performance, and has the advantages of easy production and low price.
Owner:PEKING UNIV

Cryogenic Tubular Heating Tube Vacuum Seal Fittings

InactiveCN105909791BSolve the technical requirements that cannot ensure the vacuum sealing of the furnaceSimple structureEngine sealsEngineeringHeating furnace
The invention relates to a vacuum sealing joint for a low-temperature tubular heating tube. The vacuum sealing joint comprises a tubular spiral heating tube, a vacuum joint, a sealing ring and compression nuts, wherein the vacuum joint is fixedly connected into an installation hole of a vacuum furnace wall; conducting ends of the tubular spiral heating tube are inserted in the vacuum joint; the vacuum joint is provided with inner conical holes, and in fit connection with outer conical tables on the tubular spiral heating tube through the inner conical holes; the sealing ring is arranged between the inner conical holes and the outer conical tables; and the tubular spiral heating tube is locked and fixed, and the sealing ring is compressed on the conducting ends of the tubular spiral heating tube through the compression nuts, so as to achieve a vacuum sealing effect. The joint enables a heating component of a vacuum furnace to be directly supplied with power of 220 V instead of being supplied with power by configuring voltage dropping equipment, thus configuration of a small vacuum furnace is simplified, and the equipment cost is reduced. Moreover, a reliable sealing structure is provided for producing the small vacuum heating furnace by virtue of the heating component for vacuum heating, and a technical support is provided for producing the small vacuum heating furnace by widely using the tubular heating tube.
Owner:SHANGHAI HENGTUO HYDRAULIC CONTROL TECH

Pulse xenon lamp and sealing method of the same

The invention discloses a pulse xenon lamp and a sealing method of the same. The pulse xenon lamp and the sealing method of the same are characterized in that two ends in a quartz tube in a xenon lamp are respectively provided with an electrode I and an electrode II along a transverse central axis; the electrode I and the electrode II are bilaterally symmetrical with a longitudinal central axis of the quartz tube; the tail of the electrode I at the right end of the longitudinal central axis of the quartz tube is fixedly connected with an electrode cap, a patchplug and a cable wire along the transverse central axis successively; the structure of the left end of the longitudinal central axis of the quartz tube is the same as the structure of the right end of the longitudinal central axis of the quartz tube; the electrode cap sleeves the outside of the port of the quartz tube, and active solders are filled between the electrode cap and the port of the quartz tube, and are heated to more than 600DEG C in a vacuum environment being less than 5*10-3Pa; and when the active solders are fused and are fully reacted with quartz glass, direct non-coupling sealing of the electrode cap and the quartz tube is completed. The sealing method of the pulse xenon lamp is easy to realize automation and large scale production of xenon lamp sealing, is simple and stable in the sealing process, is high in the vacuum sealing performance of the sealing area, and is high in structural intensity. The xenon lamp can bear large current, and the service life and working reliability of the xenon lamp are significantly improved.
Owner:INST OF NUCLEAR PHYSICS & CHEM CHINA ACADEMY OF

A pulsed xenon lamp and its sealing method

The invention discloses a pulse xenon lamp and a sealing method of the same. The pulse xenon lamp and the sealing method of the same are characterized in that two ends in a quartz tube in a xenon lamp are respectively provided with an electrode I and an electrode II along a transverse central axis; the electrode I and the electrode II are bilaterally symmetrical with a longitudinal central axis of the quartz tube; the tail of the electrode I at the right end of the longitudinal central axis of the quartz tube is fixedly connected with an electrode cap, a patchplug and a cable wire along the transverse central axis successively; the structure of the left end of the longitudinal central axis of the quartz tube is the same as the structure of the right end of the longitudinal central axis of the quartz tube; the electrode cap sleeves the outside of the port of the quartz tube, and active solders are filled between the electrode cap and the port of the quartz tube, and are heated to more than 600DEG C in a vacuum environment being less than 5*10-3Pa; and when the active solders are fused and are fully reacted with quartz glass, direct non-coupling sealing of the electrode cap and the quartz tube is completed. The sealing method of the pulse xenon lamp is easy to realize automation and large scale production of xenon lamp sealing, is simple and stable in the sealing process, is high in the vacuum sealing performance of the sealing area, and is high in structural intensity. The xenon lamp can bear large current, and the service life and working reliability of the xenon lamp are significantly improved.
Owner:INST OF NUCLEAR PHYSICS & CHEM CHINA ACADEMY OF

Device and method for measuring specific heat capacity by dual-flow method

A device and method for measuring specific heat capacity by a double-flow method, including a calorimeter part and a heating control part; the calorimeter part includes a vacuum chamber, the top of the vacuum chamber is provided with a lower flange and an upper flange end cover matched with the lower flange , the upper flange end cover is provided with a vacuum pipe; the inside of the vacuum chamber is provided with a second U-shaped tube and a first U-shaped tube with the same structure, and the upper ends of the second U-shaped tube and the first U-shaped tube are connected to the two-way The lower end is connected, the second U-shaped tube and the first U-shaped tube are wound with a heating wire, and the two ends of the heating wire are respectively provided with through holes for the first temperature sensor and the second temperature sensor; the heating control part is located outside the calorimeter , the heating control part is connected with the heating wire. The invention can accurately measure the specific heat capacity of the liquid, the device has good stability, and the measurable temperature and pressure range is wide. It can be used for the specific heat measurement of dilute electrolyte solutions and organic matter in industry and scientific research, and can also be used in energy and power related fields. The teaching of course experiments.
Owner:XI AN JIAOTONG UNIV

Sn-Ti-Cu ternary alloy welding flux used for sealing of quartz glass

The invention discloses Sn-Ti-Cu ternary alloy welding flux used for sealing of quartz glass. The matrix of the Sn-Ti-Cu ternary alloy welding flux is tin; the weight percentage of introduced Ti and Cu are 0.1%-2.0% of Ti and 0.1%-1.0% of Cu; the atomic percentage of introduced O is 0.05%-4.9%; and the mass percentage of impurities in the ternary alloy welding flux is smaller than or equal to 0.1%. the welding temperature range of the ternary alloy welding flux is 650 DEG C to 800 DEG C; and the welding vacuum degree is smaller than or equal to 5 multiplied by 10<-3> Pa. The ternary alloy welding flux has the advantages that no scaling powder is needed during the quartz glass sealing process; the quartz glass sealing technique is simplified; the vacuum sealing reliability of quartz glass sealing is improved; the ternary alloy welding flux can be widely applied to quartz glass sealing, and can also be applied to mutual welding of quartz glass, glass which has softening temperature above800 DEG C and takes SiO2 as the main component, a titanium material, oxygen-free copper, metal of which the surface is provided with a titanium cladding layer and the like; the ternary alloy weldingflux is especially applicable to manufacturing pulse xenon lamps; the service lives of the pulse xenon lamps can be prolonged; and the reliability of the pulse xenon lamps is obviously improved.
Owner:INST OF NUCLEAR PHYSICS & CHEM CHINA ACADEMY OF

Device and method for measuring specific heat capacity through double-flow method

ActiveCN112748145AElimination temperatureEliminates the effects of fluctuations in flow ratesMaterial heat developmentSpecific heat investigationPumping vacuumCalorimeter
The invention discloses a device and a method for measuring a specific heat capacity through a double-flow method. The device comprises a calorimeter component and a heating control component. The calorimeter component comprises a vacuum cavity, a lower flange and an upper flange end cover matched with the lower flange are arranged at the top of the vacuum cavity, and a vacuumizing pipeline is arranged on the upper flange end cover; a second U-shaped pipe and a first U-shaped pipe which are the same in structure are arranged in the vacuum cavity, the upper ends of the second U-shaped pipe and the first U-shaped pipe are both connected with the lower end of a two-way pipe, heating wires are wound on the outer sides of the second U-shaped pipe and the first U-shaped pipe, and through holes of a first temperature sensor and a second temperature sensor are formed in the two ends of the heating wires respectively; and the heating control component is positioned outside the calorimeter and is connected with the heating wire. The device can accurately measure the specific heat capacity of a liquid, is good in stability and wide in measurable temperature and pressure range, can be used for specific heat measurement of dilute electrolyte solutions and organic matters in industry and scientific research, and can also be used for teaching of course experiments of energy and power related professions.
Owner:XI AN JIAOTONG UNIV

A chemical vapor deposition device

The invention relates to chemical vapor deposition equipment which comprises a shell, a reaction system, and a heating element positioned between the shell and the reaction system, wherein the reaction system is arranged in the shell, and comprises a raw material supply device and a reaction room; the heating element is arranged on the inner wall of the shell on the outer sides of the raw material supply device and the reaction room. The chemical vapor deposition equipment is characterized in that the shell comprises a shell main body and a door; an inner cavity is formed by surrounding of the shell main body and the door, and is a cuboid; the door can be opened or close one surface of the inner cavity. The chemical vapor deposition equipment, provided by the invention, can prepare materials with huge size, and realizes the preparation of the materials with huge size under the premise of possibly decreasing the volume; the single-surface door opening design enables the daily mounting and disassembly of internal components to be directly operated simply on the ground level; the control and use of a reaction furnace can be realized by less manpower; the chemical vapor deposition equipment satisfies the industrial large-scale production of preparing the materials with huge size by the CVD (Chemical Vapor Deposition) technology, improves the productivity, and reduces the production cost.
Owner:SINOMA SYNTHETIC CRYSTALS (SHANDONG) CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products