Device and method for measuring parallelisms and flatness of circular low-stiffness workpiece

Abstract

The invention discloses a device and a method for measuring the parallelisms and the flatness of a circular low-stiffness workpiece. The device comprises a vibration isolation platform, a gas static pressure bearing unit, a swing arm unit, a gas channel seat unit, and a data processing unit. The gas static pressure bearing unit and the gas channel seat unit are fixed on the vibration isolation platform in parallel. The swing arm unit is connected with the gas static pressure bearing unit through a positioning hole. The device and the method adopt multiple channels for ventilation, so that theworkpiece is in suspension state during measurement, thereby avoiding the use of a special or universal fixture for clamping the workpiece. The non-contact measurement is performed by a distance sensor to reduce the influence on measurement results caused by the deformations of the low-stiffness workpiece. The motion mode of using a gas static pressure spindle to drive a swing arm for measurementis adopted, so that the motion process is stable, and the positioning precision of a repeated rotation can be controlled within 0.1 degree. Since the device and the method use a gas suspension mode for positioning, the flatness and the parallelisms of the circular low-stiffness non-magnetic material workpiece can be measured.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a parallelism and flatness measuring device and method for a circular low-rigidity workpiece, which is suitable for measuring the flatness and parallelism of the upper and lower surfaces of a circular low-rigidity plate workpiece. Background technique [0002] The flatness of the workpiece refers to the deviation of the macroscopic concave-convex height on the surface of the workpiece relative to the ideal plane. The parallelism of the workpiece refers to the degree to which the two planes of the workpiece are parallel, and refers to the maximum allowable error value of one plane relative to the other. It is one of the important indicators to evaluate the surface morphology of the workpiece. At present, the equipment used to measure the flatness and parallelism of the workpiece is mainly a three-dimensional coordinate measuring machine. After the workpiece is clamped by a sp...

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Problems solved by technology

[0003] Circular low-rigidity workpieces are widely used in the instrumentation industry and aviation guidance industry, but the upper and lower planes of such workpieces are circular planes, and the sides are cylindrical, which is inconvenient to clamp and is not conducive to the stability of the workpiece. The rigidity of the workpiece is poor. The probe is easy to deform the surface of the workpiece and affect the measurement effect. Therefore, the way of measuring the workpiece surface with the probe after clamping the workpiece on the three-dimensional coordinate measuring machine with a special or general fixture is not conducive to the flatness and flatness of the circular low-rigidity workpiece. Parallelism measurement

[0004] Chinese patent CN 107588744 A discloses a flatness detection system for a circular iron plate, which uses an electromagnet to attract the iron plate to be tested, which solves the problem of workpiece deformation caused by using a special or general-purpose fixture. As an acquisition device, the reference pattern and the test pattern are compared to obtain an error, but the electromagnetic adsorption clamping method is not conducive to the clamping of copper and other non-magnetic material circular workpieces, and it takes up more computer resources for image comparison.

[0005] Chinese patent CN 106352842 A discloses a device for measuring the flatness and parallelism of disc-like parts, which can measure the flatness and parallelism of disc-like parts on-site, and is suitable for complex industrial environments. However, this patent uses The gas static pressure turntable drives the workpiece to rotate and uses the contact measurement method, which is not conducive to controlling the deformation of the low-rigidity workpiece, and may have a great impact on the measurement results of the low-rigidity workpiece

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