Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure

A technology of bending fatigue and test equipment, which is applied in the field of basic research of micro-nano technology, can solve the problems of difficult and impossible clamping and centering of micron-sized samples, and achieve the goal of avoiding clamping and centering and increasing the stress level Effect

Inactive Publication Date: 2006-07-12
BEIJING UNIV OF TECH
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Problems solved by technology

However, this method is not suitable for the study of MEMS fatigue characteristics. First, the driving methods of

Method used

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  • Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure
  • Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure
  • Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure

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[0021] The specific embodiments of the present invention will be described below with reference to the accompanying drawings:

[0022] An electrostatic force-driven microstructure resonance double-sided bending fatigue test device, comprising: electrodes, side arms connected to the electrodes, and comb teeth arranged on the side arms; one of the electrodes 1 is connected to alternating current, and the bottom of the electrode 1 The electrode layer is connected to the two sets of fixed comb teeth integrated with the side arms; the other electrode 2 is grounded; through the structure layer is directly connected to the two sets of suspended comb teeth integrated with the side arms; the suspended comb teeth are connected to the The fixed comb teeth are set in staggered correspondence;

[0023] The above two sets of fixed comb teeth are connected by its in-line side arm connected to the AC electrode, and the sections of the side arms are connected by the bottom electrode; the above two...

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Abstract

The invention discloses a microstructure resonance dual-side bending fatigue experiment device driven on electrostatic force, which comprises: an electrode connected to ac and fixed lifetime with two side arms by the bottom electrode layer, another electrode grounding, a structure layer crossed opposite to said fixed comb and connected to a suspension comb with side arms, a horizontal side arm between two fixed combs connected to the ac electrode, a T-shaped side arm between two suspension combs and with horizontal side arm connected to suspension combs and vertical side arm connected to the grounding electrode by suspension beam as the fatigue test piece. This invention improves greatly the strain level of test piece.

Description

technical field [0001] The invention is used for the research on the fatigue characteristics of polysilicon, a structural material of MEMS (Micro-Electro-Mechanical System, micro-electro-mechanical system), and belongs to the field of basic research of micro-nano technology. Background technique [0002] Studies have found that silicon, which is a brittle material in the macroscopic state, will produce fatigue characteristics at the micro-nano scale, and the mechanism of this change is not yet clear. Understanding this mechanism and measuring the fatigue characteristic parameters of silicon at the micron scale are of great significance for the reliability design and life prediction of MEMS. [0003] Fatigue tests at the traditional macro scale are generally carried out by special material fatigue testing machines, which mainly have hydraulic, electromagnetic and other driving methods, and standard samples are clamped by chucks. However, this method is not suitable for the s...

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Application Information

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IPC IPC(8): G01N3/38
Inventor 丁雷尚德广贾冠华孙国芹李浩群
Owner BEIJING UNIV OF TECH
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