Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure
A technology of bending fatigue and test equipment, which is applied in the field of basic research of micro-nano technology, can solve the problems of difficult and impossible clamping and centering of micron-sized samples, and achieve the goal of avoiding clamping and centering and increasing the stress level Effect
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[0021] Specific embodiments of the present invention are described below in conjunction with accompanying drawing:
[0022] A microstructure resonance double-sided bending fatigue test device driven by electrostatic force, including: electrodes, side arms connected to the electrodes, and comb teeth arranged on the side arms; one of the electrodes 1 is connected to alternating current, and the bottom of the electrode 1 The electrode layer is connected to two sets of fixed combs integrated with the side arms; the other electrode 2 is grounded; directly connected to the two sets of suspended combs integrated with the side arms through the structural layer; the suspended combs are connected to the The fixed comb teeth are staggered corresponding settings;
[0023] The above two sets of fixed combs are connected by the in-line side arms connected to the AC electrodes, and the sections of the side arms are connected by the bottom electrodes; the above two sets of suspended combs are...
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