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Microstructure resonance single direction bending pulling multiaxle fatigue experimental device

A fatigue test and microstructure technology, applied in the basic research field of micro-nano technology, which can solve the problems of impossible completion, difficulty in clamping and centering of micron-sized samples, and achieves the improvement of stress level and the avoidance of clamping and centering. Effect

Inactive Publication Date: 2006-06-28
BEIJING UNIV OF TECH
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Problems solved by technology

However, this method is not suitable for the study of MEMS fatigue characteristics. First, the driving methods of hydraulic pressure and electromagnetic force are not suitable for the state of micron size. impossible to complete

Method used

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  • Microstructure resonance single direction bending pulling multiaxle fatigue experimental device
  • Microstructure resonance single direction bending pulling multiaxle fatigue experimental device
  • Microstructure resonance single direction bending pulling multiaxle fatigue experimental device

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Embodiment Construction

[0028] Specific embodiments of the present invention are described below in conjunction with accompanying drawing:

[0029] Schematic diagram of the structure of the microstructure resonance unidirectional bending-tensioning multi-axial fatigue test device of the present invention. see figure 1 As shown, is the front schematic view of the microstructure resonant unidirectional bending-tension multiaxial fatigue test device. It can be seen from the figure that 1, 2, and 3 are three electrodes; electrode 1 is the driving electrode, electrode 2 is the detection electrode, and electrode 3 is the ground electrode; please refer to Figure 4 As shown, it is a cross-sectional view of the electrode structure layer of the microstructure resonant unidirectional bending and pulling multiaxial fatigue test device; the surface of each electrode is a layer of metal called metal layer 4, the purpose is to enhance the conductivity, and the metal layer is under the polysilicon structure Layer...

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Abstract

A resonant one¿Cway bending and multiaxial fatigue test device of microstructure is prepared as fixing the driving electrode on outer side wall of silicon substrate through anchored layer then connecting it to driving broach pair; fixing the detecting electrode on outer side wall of silicon substrate through anchored layer then connecting it to detecting broach pair; connecting end portion of suspension vibrating block between driving broach and detecting broach to one end of test sample generating alternative stress; connecting another end of test sample to earthing electrode and forming test sample, driving unit and detecting unit to be an integral structure.

Description

technical field [0001] The invention is used for the research of polysilicon fatigue characteristics of MEMS (Micro-Electro-Mechanical System, micro-electro-mechanical system) structural material, and belongs to the field of basic research of micro-nano technology. Background technique [0002] MEMS (Micro Electromechanical System) refers to a micro-electromechanical system that integrates micro-sensors, actuators, signal processing and control circuits, interface circuits, communications and power supplies. To sum up, MEMS has the following basic characteristics, miniaturization, intelligence, multi-function, high integration and suitable for mass production. [0003] At the current scale that MEMS can reach, the basic physical laws of the macroscopic world still work, but due to the impact of size reduction (Scaling Effects), many physical phenomena are very different from the macroscopic world, so many of the original theoretical basis There will be changes, such as the ...

Claims

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Application Information

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IPC IPC(8): G01N3/38
Inventor 丁雷尚德广贾冠华孙国芹李浩群
Owner BEIJING UNIV OF TECH
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